JPS6265838U - - Google Patents

Info

Publication number
JPS6265838U
JPS6265838U JP15804485U JP15804485U JPS6265838U JP S6265838 U JPS6265838 U JP S6265838U JP 15804485 U JP15804485 U JP 15804485U JP 15804485 U JP15804485 U JP 15804485U JP S6265838 U JPS6265838 U JP S6265838U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
claw
press
fixing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15804485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15804485U priority Critical patent/JPS6265838U/ja
Publication of JPS6265838U publication Critical patent/JPS6265838U/ja
Pending legal-status Critical Current

Links

JP15804485U 1985-10-15 1985-10-15 Pending JPS6265838U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15804485U JPS6265838U (es) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15804485U JPS6265838U (es) 1985-10-15 1985-10-15

Publications (1)

Publication Number Publication Date
JPS6265838U true JPS6265838U (es) 1987-04-23

Family

ID=31081163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15804485U Pending JPS6265838U (es) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPS6265838U (es)

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