JPS6265836U - - Google Patents

Info

Publication number
JPS6265836U
JPS6265836U JP15889985U JP15889985U JPS6265836U JP S6265836 U JPS6265836 U JP S6265836U JP 15889985 U JP15889985 U JP 15889985U JP 15889985 U JP15889985 U JP 15889985U JP S6265836 U JPS6265836 U JP S6265836U
Authority
JP
Japan
Prior art keywords
stage
guide
shield case
feed screw
cooling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15889985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15889985U priority Critical patent/JPS6265836U/ja
Publication of JPS6265836U publication Critical patent/JPS6265836U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15889985U 1985-10-16 1985-10-16 Pending JPS6265836U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15889985U JPS6265836U (enrdf_load_html_response) 1985-10-16 1985-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15889985U JPS6265836U (enrdf_load_html_response) 1985-10-16 1985-10-16

Publications (1)

Publication Number Publication Date
JPS6265836U true JPS6265836U (enrdf_load_html_response) 1987-04-23

Family

ID=31082821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15889985U Pending JPS6265836U (enrdf_load_html_response) 1985-10-16 1985-10-16

Country Status (1)

Country Link
JP (1) JPS6265836U (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173932U (enrdf_load_html_response) * 1988-05-25 1989-12-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01173932U (enrdf_load_html_response) * 1988-05-25 1989-12-11

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