JPS6265836U - - Google Patents
Info
- Publication number
- JPS6265836U JPS6265836U JP15889985U JP15889985U JPS6265836U JP S6265836 U JPS6265836 U JP S6265836U JP 15889985 U JP15889985 U JP 15889985U JP 15889985 U JP15889985 U JP 15889985U JP S6265836 U JPS6265836 U JP S6265836U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- guide
- shield case
- feed screw
- cooling chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000011156 evaluation Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の実施例の正面図である。
１…液体窒素、２…冷却室、３…ステージ、４
…送りねじ、５…送りめねじ、６０１，６０２…
案内軸、７０１，７０２…案内、８…シールドケ
ース、９…ガス流入口、１００１，１００２…シ
ールドケース、１１０１，１１０２…ガス流入口
、１２…ガス管、１３０１，１３０２…ガス管、
１４０１，１４０２…ボールピース、１５０１，
１５０２…ボビン、１６…電磁石を示す。
FIG. 1 is a front view of an embodiment of the present invention. 1...Liquid nitrogen, 2...Cooling chamber, 3...Stage, 4
...Feed screw, 5...Feed female screw, 601, 602...
Guide shaft, 701, 702... Guide, 8... Shield case, 9... Gas inlet, 1001, 1002... Shield case, 1101, 1102... Gas inlet, 12... Gas pipe, 1301, 1302... Gas pipe,
1401, 1402...Ball piece, 1501,
1502... bobbin, 16... electromagnet.
Claims (1)
載するステージと、前記ステージを水平方向に搬
送させる送りねじと、前記ステージの水平方向の
案内と、前記送りねじと前記案内を覆うシールド
ケースと、前記案内と前記シールドケースとのそ
れぞれの間隙に乾燥ガスを流入する流入口とを備
えることを特徴とする半導体評価装置。 A cooling chamber filled with a cooling medium, a stage on which the cooling chamber is mounted, a feed screw for horizontally transporting the stage, a horizontal guide for the stage, and a shield case that covers the feed screw and the guide. . A semiconductor evaluation device comprising: an inlet for introducing dry gas into a gap between the guide and the shield case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889985U JPS6265836U (en) | 1985-10-16 | 1985-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15889985U JPS6265836U (en) | 1985-10-16 | 1985-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6265836U true JPS6265836U (en) | 1987-04-23 |
Family
ID=31082821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15889985U Pending JPS6265836U (en) | 1985-10-16 | 1985-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265836U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01173932U (en) * | 1988-05-25 | 1989-12-11 |
-
1985
- 1985-10-16 JP JP15889985U patent/JPS6265836U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01173932U (en) * | 1988-05-25 | 1989-12-11 |
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