JPS6265834U - - Google Patents

Info

Publication number

JPS6265834U

JPS6265834U JP15835585U JP15835585U JPS6265834U JP S6265834 U JPS6265834 U JP S6265834U JP 15835585 U JP15835585 U JP 15835585U JP 15835585 U JP15835585 U JP 15835585U JP S6265834 U JPS6265834 U JP S6265834U

Authority

JP

Japan

Prior art keywords

silicon nitride

nitride film

oxide film

silicon oxide

film

Prior art date

1985-10-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 3
• 230000003647 oxidation Effects 0.000 claims description 2
• 238000007254 oxidation reaction Methods 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
• 229910052814 silicon oxide Inorganic materials 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 2
• 239000010703 silicon Substances 0.000 description 2
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1