JPS6265828U - - Google Patents

Info

Publication number
JPS6265828U
JPS6265828U JP15839085U JP15839085U JPS6265828U JP S6265828 U JPS6265828 U JP S6265828U JP 15839085 U JP15839085 U JP 15839085U JP 15839085 U JP15839085 U JP 15839085U JP S6265828 U JPS6265828 U JP S6265828U
Authority
JP
Japan
Prior art keywords
aluminum
shroud
semiconductor manufacturing
manufacturing equipment
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15839085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH021859Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15839085U priority Critical patent/JPH021859Y2/ja
Publication of JPS6265828U publication Critical patent/JPS6265828U/ja
Application granted granted Critical
Publication of JPH021859Y2 publication Critical patent/JPH021859Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15839085U 1985-10-15 1985-10-15 Expired JPH021859Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15839085U JPH021859Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15839085U JPH021859Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Publications (2)

Publication Number Publication Date
JPS6265828U true JPS6265828U (enrdf_load_stackoverflow) 1987-04-23
JPH021859Y2 JPH021859Y2 (enrdf_load_stackoverflow) 1990-01-17

Family

ID=31081832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15839085U Expired JPH021859Y2 (enrdf_load_stackoverflow) 1985-10-15 1985-10-15

Country Status (1)

Country Link
JP (1) JPH021859Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH021859Y2 (enrdf_load_stackoverflow) 1990-01-17

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