JPS6263938U - - Google Patents
Info
- Publication number
- JPS6263938U JPS6263938U JP15590085U JP15590085U JPS6263938U JP S6263938 U JPS6263938 U JP S6263938U JP 15590085 U JP15590085 U JP 15590085U JP 15590085 U JP15590085 U JP 15590085U JP S6263938 U JPS6263938 U JP S6263938U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- gripping part
- attached
- cover
- cassette gripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15590085U JPS6263938U (pt) | 1985-10-12 | 1985-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15590085U JPS6263938U (pt) | 1985-10-12 | 1985-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6263938U true JPS6263938U (pt) | 1987-04-21 |
Family
ID=31077019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15590085U Pending JPS6263938U (pt) | 1985-10-12 | 1985-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263938U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02246135A (ja) * | 1989-03-17 | 1990-10-01 | Fujitsu Ltd | キャリヤ搬送装置 |
| KR100316606B1 (ko) * | 1999-12-31 | 2001-12-12 | 황인길 | 반도체 웨이퍼 핸들러 |
-
1985
- 1985-10-12 JP JP15590085U patent/JPS6263938U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02246135A (ja) * | 1989-03-17 | 1990-10-01 | Fujitsu Ltd | キャリヤ搬送装置 |
| KR100316606B1 (ko) * | 1999-12-31 | 2001-12-12 | 황인길 | 반도체 웨이퍼 핸들러 |
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