JPS6263929U - - Google Patents

Info

Publication number

JPS6263929U

JPS6263929U JP15597485U JP15597485U JPS6263929U JP S6263929 U JPS6263929 U JP S6263929U JP 15597485 U JP15597485 U JP 15597485U JP 15597485 U JP15597485 U JP 15597485U JP S6263929 U JPS6263929 U JP S6263929U

Authority

JP

Japan

Prior art keywords

substrate

incident angle

ion beam

ion source

ion

Prior art date

1985-10-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 8
• 238000010884 ion-beam technique Methods 0.000 claims description 4
• 238000004140 cleaning Methods 0.000 claims description 3
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000004544 sputter deposition Methods 0.000 description 1

Cited By (1)