JPS6263854A - Ultrasonic inspecting device - Google Patents

Abstract

PURPOSE:To make disassembling work of a measuring system unnecessary and to execute efficiently an inspection by executing works such as discharge and cleaning of measuring solution in a measuring solution block cell of a measuring solution cell, and the supply of measuring solution, etc., by driving a liquid feed pump. CONSTITUTION:A measuring solution cell 2 is formed by an irradiation ultrasonic propagation medium 9 so that a leaked surface acoustic wave is propagated, and also by using a material having the same acoustic impedance as that of this irradiation ultrasonic propagation medium 9, or its similar one. Also, a measuring solution block cell 2 for filling, measuring solution 16 to be compared with reference solution 10 is opened to the outside and provided, and a liquid feed pump 13 is made to communicate to this measuring solution block cell 2. Accordingly, when exchanging the measuring solution 16, works such as discharge, cleaning, supply, etc. of the measuring solution 16 from the measuring solution block cell 2 after inspection can be executed without touching a measuring system.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention utilizes ultrasonic waves to measure elastic properties, shapes, dimensions, etc. of solutions and fine particles contained in solutions. The present invention relates to an ultrasonic inspection device for inspecting characteristics.

Conventional technology Recently, a method has been proposed that uses ultrasound to measure the elastic properties of a solution and inspect the characteristics of the solution and the particles contained in the solution.This method is used as a method to measure the type and concentration of the solution. It has come to be.

For example, Journal of Chemical Physics; J.C.
hem Phys (RGarnsey and RJ
Boevol 50 No 12 P 5222,1
969) and Technical Report of the Institute of Electronics and Communication Engineers (Shoko Shioyo et al., VS84)
-5, 1984>, the propagation speed of ultrasonic waves propagating in a measurement solution is accurately measured, and the characteristics of the solution are examined from the propagation speed.

Hereinafter, a conventional ultrasonic inspection apparatus will be explained with reference to FIGS. 3 and 4. 3 is a plan view, and FIG. 4 is a sectional view taken along the line IV-IV in FIG.
03 is a reference solution cell, and each cell 102 and 103 has a sealing material 105 made of an O-ring interposed between a peripheral wall 104 made of silicon rubber and a piezoelectric substrate 101, and a reflection plate 106 made of glass is provided on the peripheral wall 104. It is being The measurement solution cell 102 is filled with a measurement solution 107, and the reference solution cell 103 is filled with a reference solution 10B. 1
09 is a transmitting IDT (IntorDigital) provided on the measurement solution side and reference solution side on the piezoelectric substrate 101.
Transducer), 110 is a transmission IDT],
An oscillator for exciting 09, 111 is a transmitting IDTl
On the opposite side of l0, reception IDTs are provided on the measurement solution side and the reference solution side on the piezoelectric substrate +01, 112 is the measurement solution side output signal, 113 is the reference solution side output signal, and 114 is the measurement solution side output signal 112. Reference solution side output signal 113
The phase detection device 115 is a phase difference signal obtained from the phase detection device 114.

Next, the operation of the above conventional example will be explained. ID for each transmission
When T+09 is simultaneously excited with continuous waves by the oscillator 110, surface acoustic waves A are generated from each transmitting IDTl09,
It propagates near the surface of the piezoelectric substrate 1O10. At this time, the silicon rubber M peripheral wall 1o4 and the sealing material 105 which is an O-ring
This makes it possible to restrict the propagation of the surface acoustic wave A to the outside -2.

When the surface acoustic wave A passes through the sealing material 105, it comes into contact with the piezoelectric substrate 101 and is loaded, causing each cell 102, 103
The leakage surface acoustic waves 12 are radiated into the measurement solution 107 and the reference solution 108 filled with water, and become in-liquid ultrasonic waves A1 and A2 that propagate in the solutions 107 and 108. Liquid ultrasound AI
, A2) are reflected by the glass reflection plate 106, and are received by the measuring solution 107 side and the reference solution 108 side II) TllN
, and a received voltage output signal 1m2.113 is generated. Here, the propagation path of the in-liquid ultrasonic waves A1 and A2 is the measurement solution 1
Since both the 07 side and the reference solution 108 side are equal, if there is a difference in the ultrasonic propagation speed between the measurement solution 107 and the reference solution +08, the reception IDT on the measurement solution 107 side and the reference solution 108 side
A time difference occurs between the in-liquid ultrasonic waves A1 and A2 that reach III. Therefore, a phase difference occurs between the output signals 112 and 113 generated from each receiving IDTII+. If this phase difference is detected by the phase detection device 114, the measurement solution 10
7 and the reference solution 108 can be determined. Since the absolute ultrasonic propagation velocity of the reference solution 108 is known, the absolute ultrasonic propagation velocity of the measurement solution 107 can be known, and from this propagation velocity the measurement solution 107
It is possible to inspect characteristics such as the concentration of microparticles in the measurement solution, the concentration of particles in the measurement solution, their shape and material.

Problems to be Solved by the Invention However, in the configuration of the conventional example described above, when replacing the measurement solution 107, it is necessary to drain the measurement solution +07 in the measurement solution cell 102, clean the measurement solution cell 102, and add a new measurement solution 1.
When performing work such as injection of ultrasonic wave A in liquid, remove the glass reflection plate 106 that defines the ultrasonic propagation path.
1. Part of the measurement system that regulates the propagation path of A2 had to be disassembled. In this way, each time the measurement solution 107 is replaced, the measurement system must be readjusted, which requires a great deal of time and effort for the measurement work, and there are other problems such as the inability to perform efficient inspections. Ah gukko.

Therefore, the present invention solves the above-mentioned problems of the conventional configuration.The present invention is an ultrasonic technology that enables the measurement solution to be exchanged easily and in a short time, and enables efficient inspection. The purpose is to provide an inspection device.

Means for solving the problems and the technical means of the present invention for solving the above-mentioned problems are as follows: A space for enclosing an irradiated ultrasonic wave propagation/medium so that leaky surface acoustic waves propagate; It has a measurement solution compartment cell made of a material having an acoustic impedance equal to or close to that of the sound wave propagation medium and filled with a measurement solution to be compared with the 8-irradiation solution, and an inlet and an outlet of the measurement solution compartment cell. The measuring solution cell is equipped with a measuring solution cell that is open to the outside, and a liquid feeding pump that is connected to an inlet of the measuring solution compartment cell.

Effects of the present invention The present invention has the configuration described in the following two sections to perform operations such as discharging the measurement solution in the measurement solution compartment cell of the measurement solution cell, cleaning the measurement solution compartment cell, and supplying new measurement solution to the measurement solution compartment cell. This can be carried out by driving a liquid pump, so there is no need to disassemble the measurement system, and the measurement solution can be exchanged easily and in a short time, allowing for efficient testing.

Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a plan view showing an ultrasonic inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line -■ in FIG.

In FIGS. 1 and 2, ■ is a piezoelectric substrate, 2 is a measurement solution cell, and 3 is a reference solution cell. A sealing material 5 made of a ring is interposed, and a reflection plate 6 made of glass is provided on the peripheral wall 4. In the measurement solution cell 2, a measurement solution compartment self is penetrated along the inner surface of the reflection plate 6, and an inlet and an outlet are opened to the outside. This measurement solution compartment self is formed into a tubular shape with an outer diameter of 1 mm and an inner diameter of 0.86 mm, and contains polyolefins based on polymethylbenzone, as well as NFC, polycarbonate, polyethylene, polypropylene, polystyrene, epoxy resin, etc. It is formed of a material having an acoustic impedance that is the same as or close to that of the irradiated ultrasound propagation medium 9. A space 8 in the measurement solution cell 2 that is separated from the measurement solution compartment self is filled with an irradiation ultrasound propagation medium 9 that is pure water, and the reference solution cell 3 is filled with a reference solution 10 that is pure water. 11 is a liquid feeding pipe connected to the inlet of the measuring solution compartment self, 12 is a draining pipe connected to the outflow port of the measuring solution compartment self, and these liquid feeding pipe II and the draining pipe 12 are connected to the measuring solution compartment self. It is made of the same material as, or made of other materials such as rubber or metal. , 13 is a liquid feeding pump provided in the middle of the liquid feeding pipe 11, and 14 is a liquid feeding pipe 11.
15 is a drain tank into which the end of the drain pipe If is inserted, and when the liquid pump 13 is driven, the measurement solution I6 in the measurement solution tank 14 is fed. The measuring solution compartment self is supplied via the tube 11 so that the measuring solution compartment self is filled with the measuring solution 16 . 17 is a transmitting IDT provided on the piezoelectric substrate 1 in the measuring solution tank 14 and the reference solution lO side; 18 is an oscillator for exciting the transmitting IDT 17; and 19 is a transmitting IDT provided on the piezoelectric substrate 1 on the opposite side of the transmitting IDT 17. 20 is a receiving IDT provided on the measurement solution I6 side and the reference solution 10 side, 20 is an output signal on the measurement solution side, 2
I is the reference solution side output signal, 22 is the measurement solution side output signal 2
0 and a phase detection device for the reference solution side output signal 21, and 23 is a phase difference signal obtained from the phase detection device 22.

Next, the operation of the above embodiment will be explained. First, the pump 13 is driven as described above, and the measuring solution 16 in the measuring solution tank 14 is supplied to the measuring solution compartment self through the liquid feeding pipe 11, so that the measuring solution compartment self is filled with the measuring solution 16.

Next, when each transmitting IDT 16 is simultaneously excited with a continuous wave of a predetermined frequency by the oscillator 17, a surface acoustic wave A is generated from each transmitting IDT 16 and propagates near the surface of the piezoelectric substrate 1.

At this time, propagation of the surface acoustic waves A to the outside can be restricted by the silicon rubber peripheral wall 4 and the sealing material 5, which is an O-ring. When the surface acoustic wave A passes through the layer material 5, it comes into contact with the piezoelectric substrate 1 and is loaded, causing each cell 2.3 to
The irradiated ultrasonic propagation medium 9 filled with
The in-liquid ultrasound waves A1 and A2 propagate in the reference solution IO.

Here, on the measurement solution cell 2 side, the focused in-liquid ultrasound AI is irradiated onto the measurement solution I6 via the measurement solution compartment self. Propagate measurement solution I6, A-Ultrasonic wave in liquid A1
is reflected by the glass reflector 6 and reaches the receiving XDT 19 on the measurement solution side, generating an output signal 20. On the reference solution side, the in-liquid ultrasonic wave A2 propagates through the reference solution 10, is reflected by the glass reflection plate 6, reaches the receiving ID'r 19 on the reference solution side, and an output signal 21 is generated.

-9 The propagation paths of ultrasonic waves A1 and A2 in liquid are measured
Since both the solution side and the reference solution side are equal, the difference in ultrasonic propagation speed between the measurement solution 16 and the reference solution 10 can be found by detecting the phase difference between the output 1 signals 20 and 21 using the phase detection device 22. Therefore, characteristics such as the concentration of the measurement solution 16 and the concentration, shape, and material of the fine particles in the measurement solution can be inspected.

After the inspection, the cleaning liquid is sent to the liquid feed pipe 1 by driving the liquid feed pump I3.
By supplying the measuring solution to the measuring solution compartment self from 1 and discharging it from the drain pipe 12, the measuring solution compartment self can be cleaned. After cleaning, fresh measuring solution 16 can be fed into the measuring solution compartment self to test its characteristics in the same manner as described above.

In the above explanation, the case where the measurement solution 16 in the measurement solution compartment self was measured in a stationary state was explained, but the measurement solution 16 is measured while driving the liquid feeding pump 13 and sequentially flowing new measurement solution 16. You can also measure it.

Effects of the Invention As described above, according to the present invention, the measurement solution cell encapsulates an irradiated ultrasonic medium so that leaky surface acoustic waves propagate, and has an acoustic impedance that is the same as or close to that of the irradiated ultrasonic propagation medium. A measuring solution compartment cell made of a material having a 6-reference solution and filled with a measurement solution to be compared is provided open to the outside, and a liquid feeding pump is communicated with the measuring solution compartment cell. Therefore, when replacing the measurement solution, operations such as draining the measurement solution from the measurement solution compartment cell after inspection, cleaning the measurement solution compartment cell, and supplying a new measurement solution to the measurement solution compartment cell should not be done by touching the measurement system. It can be done without any adjustment and no need for two adjustments.
The measurement solution can be exchanged easily and in a short time, and the test can be carried out efficiently.

[Brief explanation of the drawing]

1 and 2 show an ultrasonic inspection apparatus according to an embodiment of the present invention, FIG. 1 is a plan view, and FIG. 2 is a
■A sectional view taken in the direction of arrows, Figures 3 and 4 show a conventional ultrasonic inspection device, Figure 3 is a plan view, and Figure 4 is IV-I in Figure 3.
There is a novel view of V. ■... Piezoelectric substrate, 2... Measurement solution cell, 3... Reference solution cell, 6... Glass reflector, 7... Measurement solution compartment cell, 9... Irradiation ultrasound propagation medium , 10...
Reference solution, 11... Liquid sending pipe, 12... Draining pipe, 13
...Liquid pump, 14...Measurement solution tank, 16...
Measurement solution, 17... IDT for transmission, 18... Oscillator, 19... IDT for reception, 22... Phase detection device. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
figure

Claims (2)

[Claims] (1) A space that encapsulates the irradiated ultrasound propagation medium so that the leaky surface acoustic waves propagate, the same as the irradiated ultrasound propagation medium;
or a material having an acoustic impedance close to that, and has a measurement solution compartment cell filled with a measurement solution for comparison with a reference solution, and the measurement solution compartment cell has an inlet and an outlet opened to the outside. An ultrasonic inspection device comprising: a cell; and a liquid feeding pump connected to an inlet of the measurement solution compartment cell. (2) The ultrasonic testing device according to claim 1, wherein the measurement solution compartment cell is tubular and made of polyolefin based on Teflon, polycarbonate, polyethylene, polypropylene, polystyrene, epoxy resin, or polymethylpentene.