JPS6263633U - - Google Patents
Info
- Publication number
- JPS6263633U JPS6263633U JP15564485U JP15564485U JPS6263633U JP S6263633 U JPS6263633 U JP S6263633U JP 15564485 U JP15564485 U JP 15564485U JP 15564485 U JP15564485 U JP 15564485U JP S6263633 U JPS6263633 U JP S6263633U
- Authority
- JP
- Japan
- Prior art keywords
- entrance
- room
- partition
- clean room
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 4
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15564485U JPS6263633U (fr) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15564485U JPS6263633U (fr) | 1985-10-14 | 1985-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6263633U true JPS6263633U (fr) | 1987-04-20 |
Family
ID=31076525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15564485U Pending JPS6263633U (fr) | 1985-10-14 | 1985-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263633U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127035A (ja) * | 1982-01-25 | 1983-07-28 | Hitachi Ltd | 清浄室装置 |
-
1985
- 1985-10-14 JP JP15564485U patent/JPS6263633U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58127035A (ja) * | 1982-01-25 | 1983-07-28 | Hitachi Ltd | 清浄室装置 |