JPS6262869U - - Google Patents
Info
- Publication number
- JPS6262869U JPS6262869U JP15330985U JP15330985U JPS6262869U JP S6262869 U JPS6262869 U JP S6262869U JP 15330985 U JP15330985 U JP 15330985U JP 15330985 U JP15330985 U JP 15330985U JP S6262869 U JPS6262869 U JP S6262869U
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- workpiece
- flow path
- coating device
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985153309U JPH0444217Y2 (US20100056889A1-20100304-C00004.png) | 1985-10-07 | 1985-10-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985153309U JPH0444217Y2 (US20100056889A1-20100304-C00004.png) | 1985-10-07 | 1985-10-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6262869U true JPS6262869U (US20100056889A1-20100304-C00004.png) | 1987-04-18 |
JPH0444217Y2 JPH0444217Y2 (US20100056889A1-20100304-C00004.png) | 1992-10-19 |
Family
ID=31072075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985153309U Expired JPH0444217Y2 (US20100056889A1-20100304-C00004.png) | 1985-10-07 | 1985-10-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0444217Y2 (US20100056889A1-20100304-C00004.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS636843A (ja) * | 1986-06-26 | 1988-01-12 | Dainippon Screen Mfg Co Ltd | 基板現像処理方法 |
JPH03219445A (ja) * | 1990-01-25 | 1991-09-26 | Fuji Photo Film Co Ltd | 光情報記録媒体の製造方法 |
US8551563B2 (en) | 2008-05-13 | 2013-10-08 | Tokyo Electron Limited | Coating method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57201564A (en) * | 1981-06-01 | 1982-12-10 | Dainippon Printing Co Ltd | Coating method |
JPS6074775U (ja) * | 1984-09-13 | 1985-05-25 | 大日本スクリーン製造株式会社 | 回転式表面処理装置 |
-
1985
- 1985-10-07 JP JP1985153309U patent/JPH0444217Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57201564A (en) * | 1981-06-01 | 1982-12-10 | Dainippon Printing Co Ltd | Coating method |
JPS6074775U (ja) * | 1984-09-13 | 1985-05-25 | 大日本スクリーン製造株式会社 | 回転式表面処理装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS636843A (ja) * | 1986-06-26 | 1988-01-12 | Dainippon Screen Mfg Co Ltd | 基板現像処理方法 |
JPH03219445A (ja) * | 1990-01-25 | 1991-09-26 | Fuji Photo Film Co Ltd | 光情報記録媒体の製造方法 |
US8551563B2 (en) | 2008-05-13 | 2013-10-08 | Tokyo Electron Limited | Coating method |
Also Published As
Publication number | Publication date |
---|---|
JPH0444217Y2 (US20100056889A1-20100304-C00004.png) | 1992-10-19 |