JPS6262309U - - Google Patents

Info

Publication number
JPS6262309U
JPS6262309U JP1985152182U JP15218285U JPS6262309U JP S6262309 U JPS6262309 U JP S6262309U JP 1985152182 U JP1985152182 U JP 1985152182U JP 15218285 U JP15218285 U JP 15218285U JP S6262309 U JPS6262309 U JP S6262309U
Authority
JP
Japan
Prior art keywords
deviation
mass flow
fluid
measured
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985152182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449689Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15218285U priority Critical patent/JPH0449689Y2/ja
Priority to KR1019860000246A priority patent/KR900000663B1/ko
Publication of JPS6262309U publication Critical patent/JPS6262309U/ja
Application granted granted Critical
Publication of JPH0449689Y2 publication Critical patent/JPH0449689Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Flow Control (AREA)
JP15218285U 1985-01-19 1985-10-04 Expired JPH0449689Y2 (OSRAM)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15218285U JPH0449689Y2 (OSRAM) 1985-10-04 1985-10-04
KR1019860000246A KR900000663B1 (ko) 1985-01-19 1986-01-17 유량제어장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15218285U JPH0449689Y2 (OSRAM) 1985-10-04 1985-10-04

Publications (2)

Publication Number Publication Date
JPS6262309U true JPS6262309U (OSRAM) 1987-04-17
JPH0449689Y2 JPH0449689Y2 (OSRAM) 1992-11-24

Family

ID=31069931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15218285U Expired JPH0449689Y2 (OSRAM) 1985-01-19 1985-10-04

Country Status (1)

Country Link
JP (1) JPH0449689Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0449689Y2 (OSRAM) 1992-11-24

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