JPS6261253A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS6261253A
JPS6261253A JP60202412A JP20241285A JPS6261253A JP S6261253 A JPS6261253 A JP S6261253A JP 60202412 A JP60202412 A JP 60202412A JP 20241285 A JP20241285 A JP 20241285A JP S6261253 A JPS6261253 A JP S6261253A
Authority
JP
Japan
Prior art keywords
scanning
lens
electron beam
scanning signal
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60202412A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0479101B2 (enrdf_load_stackoverflow
Inventor
Seiichi Nakagawa
中川　清一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60202412A priority Critical patent/JPS6261253A/ja
Publication of JPS6261253A publication Critical patent/JPS6261253A/ja
Publication of JPH0479101B2 publication Critical patent/JPH0479101B2/ja
Granted legal-status Critical Current

Links

JP60202412A 1985-09-12 1985-09-12 電子線装置 Granted JPS6261253A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60202412A JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60202412A JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Publications (2)

Publication Number Publication Date
JPS6261253A true JPS6261253A (ja) 1987-03-17
JPH0479101B2 JPH0479101B2 (enrdf_load_stackoverflow) 1992-12-15

Family

ID=16457075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60202412A Granted JPS6261253A (ja) 1985-09-12 1985-09-12 電子線装置

Country Status (1)

Country Link
JP (1) JPS6261253A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432143A (ja) * 1990-05-25 1992-02-04 Hitachi Ltd 電子線装置
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
EP1045426A3 (en) * 1999-04-15 2002-07-03 ICT Integrated Circuit Testing GmbH Deflection unit in a charged particle beam device
WO2019234787A1 (ja) * 2018-06-04 2019-12-12 株式会社日立ハイテクノロジーズ 電子線装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432143A (ja) * 1990-05-25 1992-02-04 Hitachi Ltd 電子線装置
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
EP1045426A3 (en) * 1999-04-15 2002-07-03 ICT Integrated Circuit Testing GmbH Deflection unit in a charged particle beam device
WO2019234787A1 (ja) * 2018-06-04 2019-12-12 株式会社日立ハイテクノロジーズ 電子線装置
JPWO2019234787A1 (ja) * 2018-06-04 2021-06-10 株式会社日立ハイテク 電子線装置
US12347640B2 (en) 2018-06-04 2025-07-01 Hitachi High-Tech Corporation Electron beam apparatus

Also Published As

Publication number Publication date
JPH0479101B2 (enrdf_load_stackoverflow) 1992-12-15

Similar Documents

Publication Publication Date Title
US4983832A (en) Scanning electron microscope
US6653632B2 (en) Scanning-type instrument utilizing charged-particle beam and method of controlling same
JPH036615B2 (enrdf_load_stackoverflow)
JPS6261253A (ja) 電子線装置
US4321468A (en) Method and apparatus for correcting astigmatism in scanning electron microscopes and similar equipment
JP4328192B2 (ja) 荷電粒子光学系における多極場発生装置および収差補正装置
US4439681A (en) Charged particle beam scanning device
JP3429988B2 (ja) 走査電子顕微鏡
JP3101089B2 (ja) 走査電子顕微鏡における輝度補正方法
JPS6324617Y2 (enrdf_load_stackoverflow)
JPH0438100B2 (enrdf_load_stackoverflow)
JP3202857B2 (ja) 荷電粒子ビーム装置における焦点合わせ方法および装置
JPS6364255A (ja) 粒子線照射装置
JPS5811073B2 (ja) 粒子線による試料走査形試料像表示装置
JP3112541B2 (ja) 電子ビーム装置における非点補正方法
JPS5914222B2 (ja) 走査電子顕微鏡等用倍率制御装置
JP2886168B2 (ja) 電子線装置
JPS63150842A (ja) 走査電子顕微鏡
JP3037006B2 (ja) 走査電子顕微鏡における自動画像調整方法
JPH0395841A (ja) 電子顕微鏡
JPH0542102B2 (enrdf_load_stackoverflow)
JPS606996Y2 (ja) 電子顕微鏡
JPS62184750A (ja) 電子線装置
JPS5945173B2 (ja) 走査電子顕微鏡
JPH027506B2 (enrdf_load_stackoverflow)