JPS6261020A - Light beam exposing device - Google Patents

Abstract

PURPOSE:To obtain a high quality wiring pattern without developing a curl on the edge of a circuit image by forming a wiring pattern according to a vector scan system scanning a laser beam along the line of the wiring pattern. CONSTITUTION:Laser beams are sequentially reflected by two plane mirrors 10 and 12 swung on vertically rotating axes, and scanned at any positions on a printed circuit board 21. Namely, a scanner 11 swings the plane mirror 10 to position the scan laser beam 18 in the X axis direction on the printed circuit board 21, while a scanner 13 swings the plane mirror 12 to position the scan laser beam 18 on the printed circuit board 21 in the Y axis direction. A lens 4 adjusts the spot diameter of the scanned laser beam so as to correspond to the line width of the wiring pattern. By the vector scan system the laser beam is scanned along the line of the wiring pattern, thereby forming the wiring pattern in the desired line width.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus that performs direct imaging exposure on an insulating substrate using a photochemical reaction when forming a wiring pattern for a printed wiring board. .

[Conventional technology]

FIG. 4 is a diagram showing a conventional light beam exposure device, and FIG. 5 is a diagram showing an example of a circuit image formed by the conventional device. In these figures, 1 is a laser oscillator, 2 is a beam modulator, 3, 5.7 are plane mirrors, 4 is a lens, 6 is a polygon mirror, 20 is a scanning laser beam, 21 is a printed wiring board, and 22 is a movable stage. , 50 is a circuit image.

The operation will be explained below. The laser beam generated by the laser oscillator 1 is turned on or off by the beam modulator 2.
The light is then reflected by a plane mirror 3, passes through a lens 4, is further reflected by a plane mirror 5, and is irradiated onto a polygon mirror 6. The irradiated laser beam is scanned at high speed by a polygon mirror 6 rotating at high speed to become a scanning laser beam 20, reflected by a plane mirror 7, and irradiated onto a printed wiring board 21. At this time, the plane mirror 5 is installed at a position where the laser beam is reflected by the polygon mirror 6 and becomes a scanning laser beam 20, and the lens 4 is
The laser beam is adjusted so that the focus of the scanning laser beam 20 is on the printed wiring board 21. Further, in order for the scanning laser beam 20 to expose a desired portion in the scanning direction, the laser beam is turned on or off by the beam modulator 2 controlled by the drawing formant. on the other hand,
The printed wiring board 21 moves little by little in a direction perpendicular to the scanning direction at a distance less than the particle diameter of the scanning laser beam 20, so that the exposed portion in the scanning direction is formed to be continuous in the vertical direction, and a continuous wiring pattern is formed. form 50.

As described above, the conventional light beam exposure apparatus forms a wiring pattern using the rask scanning method, and the wiring pattern is formed as a collection of beam spots.

[Problem that the invention seeks to solve]

In the conventional light beam exposure apparatus as described above, since the wiring pattern is formed as a collection of beam spots, there is a problem in that the edges of the circuit image are wavy, as shown in FIG. There is also another problem in that it takes a long time to convert the drawing formant of the wiring pattern to the rask scanning mode.

This invention was made to solve the above-mentioned problems, and it is possible to achieve high-quality wiring without causing ripples on the edges of the circuit image, and without the need to convert the drawing formant to rask scanning mode. An object of the present invention is to provide a light beam exposure device that can obtain a pattern.

[Means for solving problems]

The light beam exposure apparatus according to the present invention forms a wiring pattern using a vector scanning method in which a laser beam is scanned along the lines of a wiring pattern.

[Effect]

In this invention, since the laser beam is scanned along the lines of the wiring pattern, no edge undulation occurs.

〔Example〕

FIG. 1 is a diagram showing a light beam exposure apparatus according to an embodiment of the present invention. In the figure, numbers 1 to 5.21 are the same as the conventional device shown in FIG. 10.12 is a plane mirror (movable mirror); 11.13 is a scanner for swinging the plane mirrors 10.12 on mutually perpendicular rotation axes; and 18 is a scanning laser beam.

FIG. 2 is a block diagram of a circuit for creating a scanner drive signal from a wiring pattern according to an embodiment of the present invention.
30 is a wiring pattern generator for a printed wiring board, 31 is a control device, 32 is an arithmetic circuit for correcting distortion of a scanned image,
33.34 is D/A converter, 35.36 is scanner 1
This is an amplifier for driving 1.13. FIG. 3 is a diagram showing a part of the beam scanning line on the printed wiring board,
40 is a scanning line.

Next, the operation will be explained. The laser beam is transmitted through two plane mirrors 10.12 which are oscillated on rotational axes perpendicular to each other.
The light is sequentially reflected and scanned to an arbitrary position on the printed wiring board 21. That is, the scanner 11 swings the plane mirror 10 to scan the scanning laser beam 1.
The scanning laser beam 18 is positioned on the printed wiring board 21 in the X-axis direction, and the scanner 13 swings the plane mirror 12 to position the scanning laser beam 18 on the printed wiring board 21 in the Y-axis direction. Further, the spot diameter of the scanned laser beam is adjusted by the lens 4 so as to correspond to the line width of the wiring pattern.

The scanning position of the laser beam is determined by the circuit shown in FIG. That is, as shown in FIG. 2, the signal from the wiring pattern generator 30 is input to the control device 31, and the control device 31 outputs a signal a for turning the laser beam ON or OFF and a scanner control signal S. Ru. From the above-mentioned signals, an X-direction signal and a Y-direction signal are calculated and outputted by the calculation circuit 32, and are input to the scanner via D/A converters 33, 34 and amplifiers 35 and 36. Here, as shown in FIG. 3, the arithmetic circuit 32 calculates the scanning line @ of the scanning line 40 as the swing angle θ of the scanning line 40 in the Y-axis direction increases.
When the strain e of l increases, for example, when θ=15°, e/
Since J = 0.017, which cannot be ignored, this distortion is provided to correct this distortion.

In this way, in this embodiment, a laser beam is scanned along the lines of the wiring pattern using the vector scanning method, thereby making it possible to form a wiring pattern with a desired line width.

In the above embodiment, the case where the photosensitive surface of a printed wiring board is exposed to light has been described, but the present invention can also be applied to other patterning processes using an energy beam.

〔Effect of the invention〕

As explained above, this invention enables a wiring pattern to be formed by scanning a laser beam along the lines of the wiring pattern, thereby making it possible to obtain a high-quality wiring pattern without causing undulations at the edges of the circuit image. This has the effect of eliminating the need to convert.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a light beam exposure apparatus according to an embodiment of the present invention, FIG. 2 is a block diagram of a circuit for creating a scanner drive signal from a wiring pattern according to an embodiment of the present invention, and FIG. 3 is a beam scanning FIG. 4 is a diagram showing an example of a conventional device, and FIG. 5 is a diagram showing an example of a circuit image formed by the conventional device. In the figure, 1 is a laser oscillator, 2 is a beam modulator, 10.1
2 is a plane mirror (movable mirror), 11° 13 is a scanner, 18 is a scanning laser beam, 21 is a printed wiring board,
32 is an arithmetic circuit, and 35 and 36 are amplifiers. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (3)

[Claims] (1) In an apparatus that directly images and exposes a photosensitive resin coated on a printed wiring board with a laser beam, a laser beam generating means for generating the laser beam; A light beam exposure apparatus comprising: a laser beam scanning means for scanning along a line. (2) The light beam exposure apparatus according to claim 1, wherein the laser beam scanning means comprises two movable mirrors mounted so that their rotation axes are perpendicular to each other. (3) An arithmetic circuit for correcting the distortion of the image formed on the printed wiring board is connected to the two movable mirrors for driving the two movable mirrors.
3. The light beam exposure apparatus according to claim 2, wherein the light beam exposure apparatus is provided on the input side of a drive amplifier of two scanners.