JPS6260480A - Ultrasonic motor with abrasion preventive mechanism - Google Patents

Ultrasonic motor with abrasion preventive mechanism

Info

Publication number
JPS6260480A
JPS6260480A JP60197750A JP19775085A JPS6260480A JP S6260480 A JPS6260480 A JP S6260480A JP 60197750 A JP60197750 A JP 60197750A JP 19775085 A JP19775085 A JP 19775085A JP S6260480 A JPS6260480 A JP S6260480A
Authority
JP
Japan
Prior art keywords
rotor
stator
ultrasonic motor
frame body
wear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60197750A
Other languages
Japanese (ja)
Inventor
Akio Kumada
熊田 明生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP60197750A priority Critical patent/JPS6260480A/en
Priority to EP86102249A priority patent/EP0198183B1/en
Priority to DE8686102249T priority patent/DE3686345T2/en
Priority to US06/831,578 priority patent/US4642509A/en
Publication of JPS6260480A publication Critical patent/JPS6260480A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0045Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes

Abstract

PURPOSE:To stabilize operation by mounting a stopper mechanism, through which an excess over a predetermined level of a sliding surface in a rotor and vibrations to the stator side are obstructed, when the rotor is subjected to the longitudinal vibration component of the elliptical vibrations of a stator and longitudinally vibrate. CONSTITUTION:A terminal board 5 is held between piezoelectric vibrators 2, 3, an end dust board 4 is superposed on the outside, a cap bolt 10 set to a washer 6 is penetrated to these vibrators and boards, and made to pass through an aluminum drum section 7, and the nose of the bolt 10 is penetrated to a bolthole for a torsional connector 8 in aluminum and clamped, thus unifying these vibrators, boards, drum section and connector, then constituting a stator. The stator is fitted to a case-shaped frame body 1, and the washer 6 is pressed in and fixed to the frame body 1. The outer circumference of a rotor 9 is supported by a ring-shaped shelf section 1' for the frame body 1. The frame body 1 prevents a contact with the stator on antiphase of the rotor 9.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は超音波モータに係わり、2!らに詳しくはステ
ータとロータの摺動機構の改良に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an ultrasonic motor, and includes 2! More specifically, the present invention relates to an improvement in a sliding mechanism between a stator and a rotor.

〔従来の技術およびその問題点〕[Conventional technology and its problems]

従来のこの種装置におい−Cは1例えば本発明者になる
特願昭59−172429あるいは特開昭56−138
469号に示されているように、楕円振動をするステー
タの裏面にロータを圧着することにより、ロータに発生
する回転トルクを利用したものである。モータの出力ト
ルクは圧着力に依存するので、出力トルクを大きくする
には、ロータとステータの圧着力を強くしなければなら
ない。一方、ロータを強く圧着されたステータの楕円振
動は、ステータと垂直な面内成分が抑圧されていびつな
楕円となり、ロータが受ける力は回転に寄与する成分だ
けでなく、回転に逆らう戻り成分の作用も受けるように
なり、ロータとステータの面間の相対速度にずれが生じ
、摩耗を発生するという欠点があった。
In conventional devices of this kind, -C is 1, for example, as disclosed in Japanese Patent Application No. 59-172429 or Japanese Unexamined Patent Publication No. 56-138 filed by the present inventor.
As shown in No. 469, the rotational torque generated in the rotor is utilized by pressing the rotor onto the back surface of the stator that vibrates elliptically. Since the output torque of the motor depends on the pressure force, in order to increase the output torque, the pressure force between the rotor and stator must be increased. On the other hand, the elliptical vibration of the stator with the rotor strongly compressed suppresses the in-plane component perpendicular to the stator, resulting in a distorted ellipse, and the force the rotor receives is not only the component that contributes to rotation, but also the return component that opposes rotation. This has the drawback of causing a discrepancy in the relative speed between the rotor and stator surfaces, resulting in wear.

この発明は、上記従来製品が持っていたロータとステー
タ間の摺動面の摩耗という欠点を解決し、以って耐久性
に優れた超音波モータを提供することを目的とする。
The object of the present invention is to solve the drawback of the above-mentioned conventional products, such as wear on the sliding surface between the rotor and stator, and thereby provide an ultrasonic motor with excellent durability.

〔問題を解決するための手段〕[Means to solve the problem]

超音波モータの摺動面が摩耗する原因は、ステータの振
動速度とのロータの回転に伴う摺動面の線速度との間に
ず1れが生ずるからである。もしも相対速度にずれがな
ければ、ローラによるトルク伝達v1構と同じであるか
ら原理的に摩耗は生じない。ローラを圧着しない状態で
のステータの自由端面の振動は面の法線を含む面(端面
と垂直な面)内で楕円運動をしており、楕円運動の水平
方向成分は、時間変化に対して正弦波的に変動する往復
運動であるから一定値になることはない。しかるに、ロ
ータが圧着されろと楕円運動の垂直成分が圧着力に応じ
て抑圧され、楕円の頭が水平につぶれたように変形する
。この変形部分ではロータの慣性とつり合う等速運動に
なり、ずれは生じない。
The reason why the sliding surface of an ultrasonic motor wears out is that there is a difference between the vibration speed of the stator and the linear velocity of the sliding surface as the rotor rotates. If there is no deviation in the relative speed, the torque transmission by rollers is the same as the v1 structure, so in principle no wear will occur. The vibration of the free end surface of the stator when the rollers are not pressed is an elliptical motion within a plane that includes the normal to the surface (a plane perpendicular to the end surface), and the horizontal component of the elliptical motion changes over time. Since it is a reciprocating motion that fluctuates in a sinusoidal manner, it never becomes a constant value. However, when the rotor is pressed, the vertical component of the elliptical motion is suppressed in response to the pressing force, and the head of the ellipse deforms as if it were flattened horizontally. In this deformed part, the motion is constant and balances the inertia of the rotor, and no deviation occurs.

圧着力がさらに大きくなると、ロータ分水平面位置も時
間的に変動するので、楕円の変形は複雑になり、ロータ
とステータとが楕円運動の逆位相時にも接触するように
なり、H耗の原因となる。これを防ぐには、ロータの摺
動面をつねに一定の水平面位置に保持するように支持す
ることによって解決することができる。すなわち、ロー
タがステータの楕円運動を受けて水平方向の回転子トル
クを与えら九たとき、同時に垂直方向の振動も作用し、
圧着力が大きいほど垂直成分の作用も大きくなる。その
結果、ロータがステータから離れているはずの楕円の逆
まわりの位相にあっても、ロータとステータとが強く接
触した状態を作り出すため摩耗が生ずるのであり、これ
を防ぐには、逆位相時にロータがステータに接触しない
ような構成りにすればよいことになる。
If the pressing force becomes even larger, the position of the rotor's horizontal plane changes over time, making the deformation of the ellipse more complicated, and the rotor and stator come into contact even when the elliptical motion is in opposite phase, causing H wear. Become. This can be prevented by supporting the rotor so that its sliding surface is always maintained at a constant horizontal position. In other words, when the rotor receives the elliptical motion of the stator and applies rotor torque in the horizontal direction, vibration in the vertical direction also acts at the same time.
The greater the pressure force, the greater the effect of the vertical component. As a result, even if the rotor is in the opposite phase of the ellipse, which should be separated from the stator, the rotor and stator are in strong contact, resulting in wear.To prevent this, it is necessary to It is sufficient to adopt a structure in which the rotor does not come into contact with the stator.

本発明は上記の技術的思想に基づいてなされたものであ
って、楕円振動をするステータと該ステータの端面に圧
着されるロータとを備え、上記ロータに発生する回転ト
ルクを駆動力とする超音波モータにおいて、上記ステー
タの楕円振動のたて成分によって、上記ロータの摺動面
が一定レベルを超えて上記ステータ側にたて振動するの
を防止するストッパー機構を設けたことを特徴とするも
のである。
The present invention has been made based on the above technical idea, and includes a stator that vibrates in an elliptical manner and a rotor that is crimped onto the end face of the stator. The sonic motor is characterized by being provided with a stopper mechanism that prevents the sliding surface of the rotor from vertically vibrating toward the stator beyond a certain level due to the vertical component of the elliptical vibration of the stator. It is.

〔実施例〕〔Example〕

以下1本発明になる摩耗防止機構を有する超音波モータ
の実施例を図面に従って説明する。
An embodiment of an ultrasonic motor having a wear prevention mechanism according to the present invention will be described below with reference to the drawings.

実施例1 第1図は本発明の第1実施例を示す一部断面図であって
、従来技術たとえば、特願昭59−172429号の実
施例に示されている超音波モータと構造を比較したとき
基本的な差異は、第1図に斜線で断面を示した、ロータ
の沈み込みを防止する枠体1を付設した点である。その
他は本発明者が従来より提案して来た片持梁型超音波楕
円振動子を用いた圧電モータの従来製品同じである。す
なわち、例えばPZTなとで作製された2枚の圧電振動
子2および3の正電極面を対向させた間にリード線の付
いた端子板5を挟み、外側に別の端粉塵板4を重ね、こ
れらを座金6にセットしたキャップボトル10Lご通し
、つづいてアルミニウム胴部7を通した後、ボルトの先
端をアルミニウムのねじり結合子8のボルト穴に通して
締め付けることにより、これらを一体化し、ステータと
して構成した。でき上ったステータを、例えばアセター
ル樹脂あるいはフッ樹脂など、滑性及び剛性に優れた合
成樹脂製のケース状枠体1に嵌め、座金6を枠体lに圧
入固定した。枠体】にはリング状の棚部1′ができてお
り、ロータの外周がこの棚部1′で支持されるので、棚
部1′の上面とステータ端面とは、はぼ同一面内になる
ようにステータが枠体1に圧入され、ロータ9をセット
し、リード線4および5の間に所定の高周波電圧を入力
してロータ9を回転させ、出力トルクの大きさ。
Embodiment 1 FIG. 1 is a partial sectional view showing a first embodiment of the present invention, and its structure is compared with a conventional technology, for example, an ultrasonic motor shown in an embodiment of Japanese Patent Application No. 59-172429. The basic difference is that a frame 1 is provided to prevent the rotor from sinking, the cross section of which is shown with diagonal lines in FIG. Other aspects are the same as the conventional piezoelectric motor using a cantilever type ultrasonic elliptical vibrator that the present inventor has proposed in the past. That is, a terminal plate 5 with a lead wire is sandwiched between two piezoelectric vibrators 2 and 3 made of PZT, for example, with their positive electrode surfaces facing each other, and another end dust plate 4 is placed on the outside. , pass these through the cap bottle 10L set on the washer 6, then pass them through the aluminum body 7, and then pass the tip of the bolt through the bolt hole of the aluminum torsion connector 8 and tighten them to integrate them, It was configured as a stator. The completed stator was fitted into a case-like frame 1 made of a synthetic resin with excellent slipperiness and rigidity, such as acetal resin or fluorocarbon resin, and a washer 6 was press-fitted into the frame 1. The frame has a ring-shaped shelf 1', and the outer periphery of the rotor is supported by this shelf 1', so the upper surface of the shelf 1' and the end surface of the stator are almost in the same plane. The stator is press-fitted into the frame 1, the rotor 9 is set, and a predetermined high frequency voltage is input between the lead wires 4 and 5 to rotate the rotor 9, and the magnitude of the output torque is determined.

回転のスムーズさなど検討となから、棚部1′の上面と
ステータ端面の相対的レベル差を微調した。
Considering the smoothness of rotation, we finely adjusted the relative level difference between the upper surface of the shelf 1' and the end surface of the stator.

ロータ91′!コイルスプリング12を通したボルトl
lをステータ端面のねじ穴14に締め付けることにより
圧着した。なお、コイルスプリング12とロータ9の間
にはボールベアリング13を介在させ、ロータ9が円滑
に回転するようにした。ボルト11を十分締め付け、リ
ード線4,5の間に34.70KIlz、 I OOV
の正弦波電圧を印加するとロータ9は約150rpmの
回転数で静かに回転した。出力トルクは約6Kg  c
mであった。
Rotor 91′! Bolt l passed through coil spring 12
1 was crimped by tightening it into the screw hole 14 on the end face of the stator. Note that a ball bearing 13 is interposed between the coil spring 12 and the rotor 9 so that the rotor 9 rotates smoothly. Tighten the bolt 11 sufficiently and connect the lead wires 4 and 5 with 34.70Kilz, I OOV.
When a sinusoidal voltage of 1 was applied, the rotor 9 rotated quietly at a rotation speed of about 150 rpm. Output torque is approximately 6Kg c
It was m.

ロータ9はステータの超音波振動の上下成分を受けて上
下に振動をするので、棚部1′のレベル調整が悪いと逆
位相でステータに接触しきしみ音を発すると共に摩耗が
生じる。従来の枠体なしモータの場合でも、圧着力と周
波数を微細に、VUaすれば、きしみ音および摩耗の無
い状態を実現可能であるが、その状態で30分乃至数時
間放置すると圧着条件がずれるためかきしみ音が出始め
、きしみ始めると間もなくロータ9がステータに焼き・
付き回転が停止してしまった。
Since the rotor 9 vibrates up and down in response to the up and down components of the ultrasonic vibrations of the stator, if the level adjustment of the shelf section 1' is incorrect, it will come into contact with the stator in the opposite phase, causing squeaks and wear. Even in the case of a conventional frameless motor, it is possible to achieve a state without squeaks and wear by finely adjusting the crimp force and frequency to VUa, but if left in that state for 30 minutes to several hours, the crimp conditions will deviate. A squeaking sound begins to appear, and soon after the squeak begins, the rotor 9 burns into the stator.
The rotation has stopped.

この実施例の枠体1は、ロータ9が逆位相時にステータ
に接触するのを防ぐので、一旦!O1m後は約1ケ月放
置してもきしみ及び焼き付きは生じなかった。
The frame 1 of this embodiment prevents the rotor 9 from contacting the stator when the phase is reversed, so once! After 1 m of oil, no squeaks or burn-in occurred even after leaving it for about 1 month.

尚、上記枠体1に形成される棚部1′−は、ロータ9の
下面を支承するためのものであって、その形状がリング
状に限定されるものではなく、例えば複数個の突起状の
41部を枠体1の内面周方向に等分に配設したものであ
っても良い。
Note that the shelf 1'- formed in the frame 1 is for supporting the lower surface of the rotor 9, and its shape is not limited to a ring shape. 41 portions may be equally distributed in the inner circumferential direction of the frame body 1.

実施例2 第2図に本発明になる耐12粍機構を有する超音波モー
タの別の実施例を示す。
Embodiment 2 FIG. 2 shows another embodiment of the ultrasonic motor having a 12 mm resistance mechanism according to the present invention.

本実施例の超音波モータは、ロータがステータのたて振
動を受け、圧着力による反作用でたて振動が励振゛され
、ステータの楕円振動の逆位相時にステータ端面に接触
し、ロータとステータ間の相対速度の差にもとづく面ず
れによるきしみ音、#!耗が発生するのを防ぐため、ロ
ータとステータの端部との間にスラストベアリングを介
設し、ステータの逆位相時にロータがステータ方向へ強
く振動しても、スラストベアリングにてその振動を阻止
し、それ以上ロータがステータ方向へ接近できなくする
ことによって、ロータがステータ面に圧着することを防
止したことを特徴とするものである。
In the ultrasonic motor of this embodiment, the rotor receives the vertical vibration of the stator, the vertical vibration is excited by the reaction of the crimping force, and the rotor comes into contact with the end face of the stator at the opposite phase of the elliptical vibration of the stator, creating a gap between the rotor and the stator. Squeak due to surface misalignment based on the difference in relative speed of #! To prevent wear, a thrust bearing is installed between the end of the rotor and stator, and even if the rotor vibrates strongly toward the stator when the stator is out of phase, the thrust bearing prevents the vibration. However, by preventing the rotor from approaching the stator any further, the rotor is prevented from being pressed against the stator surface.

即ち、この実施例では、第2図に示すように。That is, in this embodiment, as shown in FIG.

ロータ22の中心部にスラストベアリング23を入れ、
外周部にコイルスプリング25が装着されたボルト26
を、首ふり防止ベアリング24およびスラストベアリン
グ27を通してねじり結合子21の端面21′に締付け
、ロータ22の摺動面22″をねじり結合子21の端面
21’に圧着している。上記のように構成された超音波
モータは。
Put the thrust bearing 23 in the center of the rotor 22,
A bolt 26 with a coil spring 25 attached to its outer periphery
is tightened to the end face 21' of the torsion coupler 21 through the swing prevention bearing 24 and the thrust bearing 27, and the sliding surface 22'' of the rotor 22 is crimped to the end face 21' of the torsion coupler 21.As described above, Ultrasonic motor configured.

必要以上の圧着はスラストベアリング23で阻止される
ので、ロータがステータの楕円振動の逆位相時にステー
タに接触してきしみ音を出し、摩耗が生ずるのを防止す
ることができた。
Since excessive crimping is prevented by the thrust bearing 23, it is possible to prevent the rotor from coming into contact with the stator at the opposite phase of the stator's elliptical vibration, thereby preventing the rotor from making a squeaky sound and causing wear.

尚、上記各実施例において揚げたストッパー機構をそれ
ぞれ単独で適用するのではなく、併用することも可能で
ある6実験の結果、両機構を併用したものが、耐摩耗性
を向上する上で最も効果があった。。
In addition, as a result of six experiments in which it is possible to use the stopper mechanisms described in each of the above embodiments in combination, rather than applying them individually, the combination of both mechanisms was found to be the most effective in improving wear resistance. It worked. .

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明では楕円振動をするステー
タの端面にロータを圧着することによりロータに発生す
る回転トルクを駆動力とする超音波モータにおいて、ロ
ータがステータの楕円振動のたて振動成分を受けて、た
て振動をしたときロータの摺動面が一定のレベルを超え
て、ステータ側に振動するのを阻止するストッパー機構
を設けた構成をとったから、ステータが縮む逆位相時に
ロータがステータに接触しきしみ音を出して摩耗を生じ
、さらにロータが焼き付いて回転を防止してしまうなど
の好ましからざる事態の発生を防止することができ、以
って回転の安定化、出力トルクの増大、およびモータの
長寿命化という効果を得ることができた。
As explained above, in the present invention, in an ultrasonic motor whose driving force is rotational torque generated in the rotor by crimping the rotor to the end face of the stator that vibrates in an elliptical manner, the rotor generates a vertical vibration component of the elliptical vibration of the stator. Therefore, we adopted a stopper mechanism that prevents the sliding surface of the rotor from exceeding a certain level and vibrating toward the stator when vertical vibration occurs, so that the rotor will not move during the opposite phase when the stator contracts. This prevents undesirable situations such as the stator coming into contact with the stator and causing squeaks and wear, and the rotor seizing up and preventing rotation, thereby stabilizing rotation and increasing output torque. , and extended the life of the motor.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による摩耗防止機構を超音波モータの第
1実施例を示す一部断面図、第2図は第2実施例におけ
るロータの構造を示す一部断面図である。
FIG. 1 is a partial sectional view showing a first embodiment of an ultrasonic motor with a wear prevention mechanism according to the present invention, and FIG. 2 is a partial sectional view showing the structure of a rotor in the second embodiment.

Claims (3)

【特許請求の範囲】[Claims] (1)楕円振動をするステータと該ステータの端面に圧
着されるロータとを備え、上記ロータに発生する回転ト
ルクを駆動力とする超音波モータにおいて、上記ステー
タの楕円振動のたて成分によつて、上記ロータの摺動面
が一定レベルを超えて上記ステータ側にたて振動するの
を防止するストツパー機構を設けたことを特徴とする摩
耗防止機構を有する超音波モータ。
(1) In an ultrasonic motor that is equipped with a stator that vibrates elliptically and a rotor that is crimped onto the end face of the stator, and uses the rotational torque generated in the rotor as a driving force, the vertical component of the elliptical vibration of the stator An ultrasonic motor having a wear prevention mechanism, characterized in that a stopper mechanism is provided to prevent the sliding surface of the rotor from vertically vibrating toward the stator beyond a certain level.
(2)特許請求の範囲第1項記載の摩耗防止機構を有す
る超音波モータのストツパー機構として、一端がステー
タに固定され、他端にロータの摺動面を支承する棚部が
形成された合成樹樹脂材料製の枠体を用いたことを特徴
とする摩耗防止機構を有すろ超音波モータ。
(2) As a stopper mechanism for an ultrasonic motor having a wear prevention mechanism according to claim 1, one end is fixed to a stator, and the other end is formed with a shelf part that supports the sliding surface of the rotor. A filter ultrasonic motor having a wear prevention mechanism characterized by using a frame made of resin material.
(3)特許請求の範囲第1項記載の摩耗防止機構を有す
る超音波モータのストツパー機構として、ステータ及び
ロータを圧接するボルトと上記ロータとの間にスラスト
ベアリングを介設したことを特徴とする摩耗防止機構を
有す超音波モータ。
(3) As a stopper mechanism for an ultrasonic motor having a wear prevention mechanism as set forth in claim 1, a thrust bearing is interposed between the rotor and a bolt that presses the stator and rotor. Ultrasonic motor with anti-wear mechanism.
JP60197750A 1985-04-19 1985-09-09 Ultrasonic motor with abrasion preventive mechanism Pending JPS6260480A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60197750A JPS6260480A (en) 1985-09-09 1985-09-09 Ultrasonic motor with abrasion preventive mechanism
EP86102249A EP0198183B1 (en) 1985-04-19 1986-02-20 Ultrasonic motor
DE8686102249T DE3686345T2 (en) 1985-04-19 1986-02-20 ULTRASONIC MOTOR.
US06/831,578 US4642509A (en) 1985-04-19 1986-02-21 Ultrasonic motor using bending, longitudinal and torsional vibrations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60197750A JPS6260480A (en) 1985-09-09 1985-09-09 Ultrasonic motor with abrasion preventive mechanism

Publications (1)

Publication Number Publication Date
JPS6260480A true JPS6260480A (en) 1987-03-17

Family

ID=16379719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60197750A Pending JPS6260480A (en) 1985-04-19 1985-09-09 Ultrasonic motor with abrasion preventive mechanism

Country Status (1)

Country Link
JP (1) JPS6260480A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63311221A (en) * 1987-06-12 1988-12-20 Nikon Corp Lens body structure incorporating ultrasonic motor
US4885499A (en) * 1988-02-12 1989-12-05 Ngk Spark Plug Co., Inc. Ultrasonic driven type motor
US4933590A (en) * 1988-03-11 1990-06-12 Nec Corporation Ultrasonic motor
US4975614A (en) * 1987-03-18 1990-12-04 Honda Electric Co., Ltd. Ultrasonic driving device
US5269583A (en) * 1991-05-30 1993-12-14 Nissan Motor Co., Ltd. Front end structure of vehicle body

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4975614A (en) * 1987-03-18 1990-12-04 Honda Electric Co., Ltd. Ultrasonic driving device
JPS63311221A (en) * 1987-06-12 1988-12-20 Nikon Corp Lens body structure incorporating ultrasonic motor
US4885499A (en) * 1988-02-12 1989-12-05 Ngk Spark Plug Co., Inc. Ultrasonic driven type motor
US4933590A (en) * 1988-03-11 1990-06-12 Nec Corporation Ultrasonic motor
US5269583A (en) * 1991-05-30 1993-12-14 Nissan Motor Co., Ltd. Front end structure of vehicle body

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