JPS6260254U - - Google Patents
Info
- Publication number
- JPS6260254U JPS6260254U JP15023385U JP15023385U JPS6260254U JP S6260254 U JPS6260254 U JP S6260254U JP 15023385 U JP15023385 U JP 15023385U JP 15023385 U JP15023385 U JP 15023385U JP S6260254 U JPS6260254 U JP S6260254U
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- film forming
- forming apparatus
- substrate holder
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023385U JPS6260254U (ar) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15023385U JPS6260254U (ar) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6260254U true JPS6260254U (ar) | 1987-04-14 |
Family
ID=31066188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15023385U Pending JPS6260254U (ar) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6260254U (ar) |
-
1985
- 1985-09-30 JP JP15023385U patent/JPS6260254U/ja active Pending