JPS6259616U - - Google Patents

Info

Publication number
JPS6259616U
JPS6259616U JP15034085U JP15034085U JPS6259616U JP S6259616 U JPS6259616 U JP S6259616U JP 15034085 U JP15034085 U JP 15034085U JP 15034085 U JP15034085 U JP 15034085U JP S6259616 U JPS6259616 U JP S6259616U
Authority
JP
Japan
Prior art keywords
transfer
workpiece
turntable
bodies
feed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15034085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15034085U priority Critical patent/JPS6259616U/ja
Publication of JPS6259616U publication Critical patent/JPS6259616U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Retarders (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP15034085U 1985-09-30 1985-09-30 Pending JPS6259616U (US06582424-20030624-M00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15034085U JPS6259616U (US06582424-20030624-M00016.png) 1985-09-30 1985-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15034085U JPS6259616U (US06582424-20030624-M00016.png) 1985-09-30 1985-09-30

Publications (1)

Publication Number Publication Date
JPS6259616U true JPS6259616U (US06582424-20030624-M00016.png) 1987-04-13

Family

ID=31066394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15034085U Pending JPS6259616U (US06582424-20030624-M00016.png) 1985-09-30 1985-09-30

Country Status (1)

Country Link
JP (1) JPS6259616U (US06582424-20030624-M00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011148633A1 (ja) * 2010-05-27 2011-12-01 株式会社アルバック トラバース装置及び基板処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011148633A1 (ja) * 2010-05-27 2011-12-01 株式会社アルバック トラバース装置及び基板処理装置
JPWO2011148633A1 (ja) * 2010-05-27 2013-07-25 株式会社アルバック トラバース装置及び基板処理装置
JP5463417B2 (ja) * 2010-05-27 2014-04-09 株式会社アルバック トラバース装置及び基板処理装置

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