JPS6259543A - Quartz glass tube - Google Patents
Quartz glass tubeInfo
- Publication number
- JPS6259543A JPS6259543A JP60198347A JP19834785A JPS6259543A JP S6259543 A JPS6259543 A JP S6259543A JP 60198347 A JP60198347 A JP 60198347A JP 19834785 A JP19834785 A JP 19834785A JP S6259543 A JPS6259543 A JP S6259543A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- glass tube
- boron
- low
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
- C03B37/01892—Deposition substrates, e.g. tubes, mandrels
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01211—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments by inserting one or more rods or tubes into a tube
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
- C03B2201/04—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/14—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with boron and fluorine
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、通信用の光ファイバ、イメージスコープ用の
マルチプルファイバなどの光伝送体の製造に好適に用い
られる石英ガラス管に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a quartz glass tube that is suitably used for manufacturing optical transmission bodies such as optical fibers for communications and multiple fibers for image scopes.
〔従来技術並びに発明が解決しようとする間゛照点〕硼
素ドープされた石英ガラス層を石英ガラス管の内表面に
、例えばＣＶＤ法により内けする場合、ドーパントとし
て用いられた硼素元素が石英ガラス管に含まれている水
分を吸収して、硼素ドープ石英ガラス層のＯＨ基含を量
を高める問題がある。[Prior art and the point of view to be solved by the invention] When a boron-doped quartz glass layer is deposited on the inner surface of a quartz glass tube by, for example, the CVD method, the boron element used as a dopant is removed from the quartz glass. There is a problem of absorbing water contained in the tube and increasing the OH group content of the boron-doped quartz glass layer.
かかる石英ガラス管を用いて光伝送体を製造した場合に
は、伝送損失の小さい光伝送体は得難い。When manufacturing an optical transmission body using such a quartz glass tube, it is difficult to obtain an optical transmission body with low transmission loss.
本発明は、上記の問題を解決するために、０［１基含有
量が２００ｐｐｂ以下の低○【（石英ガラス管の内表面
に硼素ドープされた石英ガラス層が形成されてなる石英
ガラス管を提案する。In order to solve the above-mentioned problems, the present invention provides a quartz glass tube in which a boron-doped quartz glass layer is formed on the inner surface of the quartz glass tube. suggest.
たとえ硼素ドーパントの水吸収作用が働いても、肉付さ
れる石英ガラス管自体が０Ｈ）５含有全２００ｐｐｂ以
下のものであるために、硼素ドープ石英ガラス層のＯＨ
基含有量の増大は実質上止しない。Even if the water absorption effect of the boron dopant works, since the quartz glass tube itself contains less than 200 ppb of 0H)5, the OH of the boron-doped quartz glass layer is
The increase in group content virtually never stops.
低ＯＨ石英ガラス管は天然石英からなるものであっても
合成石英からなるものであってもよいが、トー記の方法
で求めたＯＨ基含有量が２００ｐｐｂ以丁であることが
必須である。それよりＯＨ基含有量が多いと、硼素ドー
プ石英ガラスＩＣのＯＨ基含有Ｖが光伝送路、特に通信
用光ファイバの伝送特性に悪影響を及ぼす程に増大する
。従って、本発明において用いる低ＯＨ石英ガラス管と
しては、ＯＬ（基含有量が１００ｐｐｂ以下、特に５０
ｐｐｂ以ドのものが好ましい。The low-OH quartz glass tube may be made of natural quartz or synthetic quartz, but it is essential that the OH group content determined by Toh's method be 200 ppb or more. If the OH group content is higher than that, the OH group content V of the boron-doped quartz glass IC increases to the extent that it adversely affects the transmission characteristics of an optical transmission line, particularly an optical fiber for communication. Therefore, as the low-OH quartz glass tube used in the present invention, OL (with a group content of 100 ppb or less, especially 50
Preferably less than ppb.
０１４基含有星：被検石英ガラスをコアとし、その外側
に、無水のクラット層を有する光ファイバを線引により
作成し、この光ファイバにつき波長１．３１Ｌ−にお＋
Ｊる［Ｄ失値Ｌ Ｉ（ｄＢ／ １ｕａ）を測定し、次の
弐により算出する。Stars containing 014 groups: An optical fiber having a core of quartz glass to be tested and an anhydrous crat layer on the outside was created by drawing.
Measure the loss value LI (dB/1ua) and calculate it using the following procedure.
ＯＨ基含有量（ｐｐｍ） ＝ ０．０１８５ ｘ （Ｌ
＋ −Ｌｏ ）ここに＋−ｏは、上記被検光ファイバ
がＯＨ基を含まないと仮定したときの波長１６３８戸に
おける推定１員失値（ｄＢ／に＋ａ）である。OH group content (ppm) = 0.0185 x (L
+-Lo) Here, +-o is the estimated one-member loss value (+a in dB/) at a wavelength of 1638, assuming that the optical fiber to be tested does not contain an OH group.
低ＯＨ石英ガラス管の内壁への硼素ドープされた石英ガ
ラス層の形成は、たとえばＳｉＣβ４、ＳｉＦ４などの
５ｉ０２生成物質と、Ｂ（１！３、ＢＦ３などの硼素源
を有する材料とを用いてＣＶＤ法など周知の方法にて行
うことができる。特にＢＦ３とＳｉＣβ４との混合物、
ｒ３Ｃｉ！３とＳｉＦ４との混合物など、硼素とフッ素
とが共にドープされることが好ましく、特に、ドープ材
料としてＢＦ３を用いることが好ましい。The formation of a boron-doped quartz glass layer on the inner wall of a low-OH quartz glass tube can be achieved by CVD using a 5i02 generating material such as SiCβ4, SiF4, and a material with a boron source such as B(1!3, BF3). It can be carried out by a well-known method such as the method.In particular, a mixture of BF3 and SiCβ4,
r3Ci! Preferably, boron and fluorine are co-doped, such as a mixture of 3 and SiF4, and in particular it is preferred to use BF3 as the doping material.
以下、実施例、比較例により本発明を一層詳細に説明す
る。以下において、部、％はいずれも重盪部、重量％を
書味する。Hereinafter, the present invention will be explained in more detail with reference to Examples and Comparative Examples. In the following, both parts and percentages are expressed as weight percentages.
実施例１
０Ｈ５含有１１５０ｐｐｈの合成石英からなる外径２０
龍、厚さ！、 ５ ｎの石英ガラス管の内壁に、５ｉＣ
ｆｉ＋＝ ＢＦ３および０２の混合ガスを用い−て、常
法に従って硼素とフッ素とでドープされたｎ冒が１．４
４８５ 、厚さ０．８ ｕ＋の石英ガラスクラッド層を
形成した。Example 1 Outer diameter 20 made of synthetic quartz containing 0H5 and 1150 pph
Dragon, thickness! , 5iC on the inner wall of a 5n quartz glass tube.
fi + = 1.4 doped with boron and fluorine using a mixed gas of BF3 and 02 according to a conventional method.
485, and a 0.8 u+ thickness silica glass cladding layer was formed.
実施例２〜４、比較例１
用いた石英ガラス管のＯＨ基含有川用、それぞれ１００
ｐｐｂ（実施例２） 、５０ｐｐｂ （実施例３）、
２０ｐｐｂ（実施例４ ） 、２００．０００ ｐｐｂ
（比較例１）、である屯においてのみ異なり、他は
上記実施例１と同様にしてクラッド層が内付けられた石
英ガラス管を得た。Examples 2 to 4, Comparative Example 1 The OH group-containing quartz glass tube used was 100% each.
ppb (Example 2), 50ppb (Example 3),
20ppb (Example 4), 200.000ppb
(Comparative Example 1) A quartz glass tube having a cladding layer therein was obtained in the same manner as in Example 1, except that the tube was different.
比較例２
Ｓ ｌＣｅ４ 、ＢＦ３．０２の混合ガスに代わって、
ＳｉＦ４と０２との混合ガスを用い、フッ素のみがドー
プされたｎ。が１．４４８０であるクラット層を内イ」
けしだ点においてのみ比較例１と異なる方法にてクラッ
ド層肉付は石英ガラス管を得た。Comparative Example 2 Instead of a mixed gas of S lCe4 and BF3.02,
n doped with only fluorine using a mixed gas of SiF4 and 02. is 1.4480.
A quartz glass tube was obtained in which the cladding layer was thickened using a method different from that of Comparative Example 1 only in terms of shading.
０ ）（基含有量が、２０ｐｐｂ、外径８貫嘗の純石英
ガラスロッドを上記で得た各石英ガラス管に挿入し、特
公昭５９−２４０９２の実施例１３と同じ方法および表
面処理ガラスを用いてロッド・イン・チューブ法にて光
フアイバ母材を、次いで該母材を２．０００℃で線引き
し、ウレタン樹脂プリコートを施してコア径６０−、ク
ラッド摩１５戸、プリコート層を除くファイバ外径１５
０戸の光ファイバを得た。0) (A pure quartz glass rod with a group content of 20 ppb and an outer diameter of 8 cm was inserted into each of the quartz glass tubes obtained above, and the same method and surface-treated glass as in Example 13 of Japanese Patent Publication No. 59-24092 were applied. An optical fiber base material is made using the rod-in-tube method, and then the base material is drawn at 2,000°C, and a urethane resin precoat is applied to produce a fiber with a core diameter of 60 mm, a cladding layer of 15 mm, and a fiber excluding the precoat layer. Outer diameter 15
Obtained optical fiber for 0 homes.
前記の方法で測定した各実施例、比較例からの光ファイ
バのＯＨ５含有量（コアのＯＨ７Ｊ含有屋の金遣とクラ
ッド層のＯ）（基含有量の一部とが測定にかかる）は、
それぞれ実施例１が２５ｐｐｂ、実施例２：２２ｐｐｂ
、実施例３：２０ｐｐｂ、実施例４：２０ｐｐｂ、比較
例Ｌ：ＬＯＯＯｐｐｂ、比較例２：３０ｐｐｂであった
命
これらの結果から、各実施例および硼素をドーパントと
して用いない比較例２においては、クラッド層のＯＨ基
含有量の増加量は極く僅かであるが、比較例１における
増加は著し５いことが明らかである。The OH5 content (OH7J content in the core and O in the cladding layer) of the optical fibers from each example and comparative example measured by the above method (a part of the group content is measured) is:
Example 1: 25 ppb, Example 2: 22 ppb, respectively.
, Example 3: 20 ppb, Example 4: 20 ppb, Comparative Example L: LOOOppb, Comparative Example 2: 30 ppb. Although the increase in the OH group content of the layer is very small, it is clear that the increase in Comparative Example 1 is significant.
（発明の効果）
ドーパントとしての硼素は、石英ガラス光ファイバ製造
上極めて重要なものであることは周知の通りであり、一
方、硼素ドーパントは、前記した水吸収作用を有するも
のであるが、本発明により水吸収作用の問題が解消する
。(Effect of the invention) It is well known that boron as a dopant is extremely important in manufacturing silica glass optical fibers.On the other hand, boron dopant has the above-mentioned water absorption effect, but this The invention eliminates the problem of water absorption.
特許出願人 大日日本電線株式会社 ′、１Patent applicant: Dainichi Nippon Electric Cable Co., Ltd. ', 1
Claims (3)
ガラス管の内表面に硼素ドープされた石英ガラス層が形
成されてなることを特徴とする石英ガラス管。(1) A quartz glass tube characterized in that a boron-doped quartz glass layer is formed on the inner surface of a low-OH quartz glass tube with an OH group content of 200 ppb or less.
ラス管である特許請求の範囲第（１）項記載の石英ガラ
ス管。(2) The quartz glass tube according to claim (1), wherein the low OH quartz glass tube is a natural or synthetic quartz glass tube.
してＢＦ＿３を用い、ＣＶＤ法により形成されたもので
ある特許請求の範囲第（１）項および第（２）項記載の
石英ガラス管。(3) The quartz glass tube according to claims (1) and (2), wherein the boron-doped quartz glass layer is formed by a CVD method using BF_3 as a doping material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60198347A JPH0665613B2 (en) | 1985-09-06 | 1985-09-06 | Quartz glass tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60198347A JPH0665613B2 (en) | 1985-09-06 | 1985-09-06 | Quartz glass tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6259543A true JPS6259543A (en) | 1987-03-16 |
| JPH0665613B2 JPH0665613B2 (en) | 1994-08-24 |
Family
ID=16389607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60198347A Expired - Fee Related JPH0665613B2 (en) | 1985-09-06 | 1985-09-06 | Quartz glass tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0665613B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4906195A (en) * | 1987-07-15 | 1990-03-06 | Yazaki Corporation | Built-in function type wiring apparatus |
| US5760490A (en) * | 1995-10-25 | 1998-06-02 | Yazaki Corporation | Electronic unit for vehicle |
| EP0972752A1 (en) * | 1998-07-14 | 2000-01-19 | Lucent Technologies Inc. | Large preform for singlemode fiber and method for making same |
| WO2000027767A1 (en) * | 1998-11-09 | 2000-05-18 | Heraeus Quarzglas Gmbh & Co. Kg | Quartz glass tube for use in the production of optical fiber preforms |
| EP1061054A1 (en) * | 1999-06-18 | 2000-12-20 | Lucent Technologies Inc. | Method of making optical fiber by a rod-in tube process and fiber made by the method |
| WO2001090010A1 (en) * | 2000-05-24 | 2001-11-29 | Heraeus Tenevo Ag | Method for producing an optical fibre and blank for an optical fibre |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2290102A1 (en) * | 1998-03-16 | 1999-09-23 | The Furukawa Electric Co., Ltd. | Wavelength-multiplexing optical transmission channel and optical fiber used therefor |
-
1985
- 1985-09-06 JP JP60198347A patent/JPH0665613B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4906195A (en) * | 1987-07-15 | 1990-03-06 | Yazaki Corporation | Built-in function type wiring apparatus |
| US5760490A (en) * | 1995-10-25 | 1998-06-02 | Yazaki Corporation | Electronic unit for vehicle |
| EP0972752A1 (en) * | 1998-07-14 | 2000-01-19 | Lucent Technologies Inc. | Large preform for singlemode fiber and method for making same |
| WO2000027767A1 (en) * | 1998-11-09 | 2000-05-18 | Heraeus Quarzglas Gmbh & Co. Kg | Quartz glass tube for use in the production of optical fiber preforms |
| EP1061054A1 (en) * | 1999-06-18 | 2000-12-20 | Lucent Technologies Inc. | Method of making optical fiber by a rod-in tube process and fiber made by the method |
| WO2001090010A1 (en) * | 2000-05-24 | 2001-11-29 | Heraeus Tenevo Ag | Method for producing an optical fibre and blank for an optical fibre |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0665613B2 (en) | 1994-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |