JPS6258421U - - Google Patents

Info

Publication number
JPS6258421U
JPS6258421U JP14981785U JP14981785U JPS6258421U JP S6258421 U JPS6258421 U JP S6258421U JP 14981785 U JP14981785 U JP 14981785U JP 14981785 U JP14981785 U JP 14981785U JP S6258421 U JPS6258421 U JP S6258421U
Authority
JP
Japan
Prior art keywords
single crystal
crystal substrate
cantilever
cantilever beam
optical waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14981785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14981785U priority Critical patent/JPS6258421U/ja
Publication of JPS6258421U publication Critical patent/JPS6258421U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP14981785U 1985-09-30 1985-09-30 Pending JPS6258421U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14981785U JPS6258421U (enrdf_load_stackoverflow) 1985-09-30 1985-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14981785U JPS6258421U (enrdf_load_stackoverflow) 1985-09-30 1985-09-30

Publications (1)

Publication Number Publication Date
JPS6258421U true JPS6258421U (enrdf_load_stackoverflow) 1987-04-11

Family

ID=31065381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14981785U Pending JPS6258421U (enrdf_load_stackoverflow) 1985-09-30 1985-09-30

Country Status (1)

Country Link
JP (1) JPS6258421U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767956A (en) * 1980-10-15 1982-04-24 Yokogawa Hokushin Electric Corp Recorder
JPS57163205A (en) * 1981-03-31 1982-10-07 Matsushita Electric Works Ltd Optical switch

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767956A (en) * 1980-10-15 1982-04-24 Yokogawa Hokushin Electric Corp Recorder
JPS57163205A (en) * 1981-03-31 1982-10-07 Matsushita Electric Works Ltd Optical switch

Similar Documents

Publication Publication Date Title
US6603591B2 (en) Microminiature movable device
JPS6258421U (enrdf_load_stackoverflow)
JPH0262509U (enrdf_load_stackoverflow)
JPH02122741U (enrdf_load_stackoverflow)
JPH0166734U (enrdf_load_stackoverflow)
JPS61117401U (enrdf_load_stackoverflow)
JPS6260053U (enrdf_load_stackoverflow)
JPH0325239U (enrdf_load_stackoverflow)
JPH03196025A (ja) 平面光導波路型光デバイスおよび作製方法
JPS6328244U (enrdf_load_stackoverflow)
JPS6189136U (enrdf_load_stackoverflow)
JPH0159217U (enrdf_load_stackoverflow)
JPH038313U (enrdf_load_stackoverflow)
JPS6235309U (enrdf_load_stackoverflow)
JPS62168109U (enrdf_load_stackoverflow)
JPH01129254U (enrdf_load_stackoverflow)
JPS63200358U (enrdf_load_stackoverflow)
JPH01154460U (enrdf_load_stackoverflow)
JPS6258719U (enrdf_load_stackoverflow)
JPH0275612U (enrdf_load_stackoverflow)
JPS6223471U (enrdf_load_stackoverflow)
JP2000258329A5 (enrdf_load_stackoverflow)
JPH0369173U (enrdf_load_stackoverflow)
JPS62185047U (enrdf_load_stackoverflow)
JPH0211367U (enrdf_load_stackoverflow)