JPS6258039U - - Google Patents
Info
- Publication number
- JPS6258039U JPS6258039U JP14846185U JP14846185U JPS6258039U JP S6258039 U JPS6258039 U JP S6258039U JP 14846185 U JP14846185 U JP 14846185U JP 14846185 U JP14846185 U JP 14846185U JP S6258039 U JPS6258039 U JP S6258039U
- Authority
- JP
- Japan
- Prior art keywords
- rotating drum
- side wall
- attached
- semiconductor wafer
- closable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14846185U JPS6258039U (enExample) | 1985-09-28 | 1985-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14846185U JPS6258039U (enExample) | 1985-09-28 | 1985-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258039U true JPS6258039U (enExample) | 1987-04-10 |
Family
ID=31062750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14846185U Pending JPS6258039U (enExample) | 1985-09-28 | 1985-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258039U (enExample) |
-
1985
- 1985-09-28 JP JP14846185U patent/JPS6258039U/ja active Pending