JPS6258037U - - Google Patents

Info

Publication number

JPS6258037U

JPS6258037U JP15033885U JP15033885U JPS6258037U JP S6258037 U JPS6258037 U JP S6258037U JP 15033885 U JP15033885 U JP 15033885U JP 15033885 U JP15033885 U JP 15033885U JP S6258037 U JPS6258037 U JP S6258037U

Authority

JP

Japan

Prior art keywords

container

sprayed

chemical solution

upper nozzle

cleaning

Prior art date

1985-09-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 5
• 239000000126 substance Substances 0.000 claims description 5
• 239000007788 liquid Substances 0.000 claims description 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1
• 239000000463 material Substances 0.000 description 1
• 238000001947 vapour-phase growth Methods 0.000 description 1
• 238000005406 washing Methods 0.000 description 1

Cited By (1)