JPS6256792U - - Google Patents

Info

Publication number
JPS6256792U
JPS6256792U JP14773185U JP14773185U JPS6256792U JP S6256792 U JPS6256792 U JP S6256792U JP 14773185 U JP14773185 U JP 14773185U JP 14773185 U JP14773185 U JP 14773185U JP S6256792 U JPS6256792 U JP S6256792U
Authority
JP
Japan
Prior art keywords
gear
exhaust chamber
booster pump
rotors
mechanical booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14773185U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14773185U priority Critical patent/JPS6256792U/ja
Publication of JPS6256792U publication Critical patent/JPS6256792U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係る一実施例の構成を示す断
面図、第2図は本考案の他の構成図を示す断面図
、第3図は従来例の構成を示す断面図、第4図a
〜同図cはメカニカルブースタポンプの作動説明
図である。 1……排気室、2,3……ロータ、4……吸気
口、5……排気口、600…ポンプケース、6a
……端部、7……第1の隔壁、8……第2の隔壁
、9……歯車室、10,10a,10b……駆動
軸、11,11a,11b……従動軸、12……
軸受、13……駆動同期歯車、14……従動回期
歯車、15……潤滑油、16……軸受、17……
シール材、18……シール保持受、19……隔絶
シール材、20……マグネツト、21……回転体
FIG. 1 is a cross-sectional view showing the configuration of an embodiment of the present invention, FIG. 2 is a cross-sectional view showing another configuration of the present invention, FIG. 3 is a cross-sectional view showing the configuration of a conventional example, and FIG. a
- Figure c is an explanatory diagram of the operation of the mechanical booster pump. 1... Exhaust chamber, 2, 3... Rotor, 4... Intake port, 5... Exhaust port, 600... Pump case, 6a
... end, 7 ... first partition, 8 ... second partition, 9 ... gear chamber, 10, 10a, 10b ... drive shaft, 11, 11a, 11b ... driven shaft, 12 ...
Bearing, 13... Drive synchronous gear, 14... Driven rotation gear, 15... Lubricating oil, 16... Bearing, 17...
Seal material, 18... Seal holding receiver, 19... Isolation seal material, 20... Magnet, 21... Rotating body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 気体排出用の一対のロータが収容されている排
気室と、この排気室に隣設され前記のロータを同
期回転させる歯車が収容されている歯車室とを有
するメカニカルブースタポンプにおいて、前記排
気室と歯車室とは気密に隔絶されていることを特
徴とするメカニカルブースタポンプ。
A mechanical booster pump having an exhaust chamber housing a pair of rotors for discharging gas, and a gear chamber adjacent to the exhaust chamber housing a gear for synchronously rotating the rotors, wherein the exhaust chamber and A mechanical booster pump that is airtightly isolated from the gear chamber.
JP14773185U 1985-09-27 1985-09-27 Pending JPS6256792U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14773185U JPS6256792U (en) 1985-09-27 1985-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14773185U JPS6256792U (en) 1985-09-27 1985-09-27

Publications (1)

Publication Number Publication Date
JPS6256792U true JPS6256792U (en) 1987-04-08

Family

ID=31061361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14773185U Pending JPS6256792U (en) 1985-09-27 1985-09-27

Country Status (1)

Country Link
JP (1) JPS6256792U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60173386A (en) * 1984-02-20 1985-09-06 Mitsubishi Electric Corp Root's blower for circulation of laser gas

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60173386A (en) * 1984-02-20 1985-09-06 Mitsubishi Electric Corp Root's blower for circulation of laser gas

Similar Documents

Publication Publication Date Title
JPS6256792U (en)
JPS62105384U (en)
JPS61155684U (en)
JPS6271392U (en)
JPS61138878U (en)
JPS62188U (en)
JPS6446495U (en)
JPS61114085U (en)
JPS61200484U (en)
JPS61192590U (en)
JPH02141687U (en)
JPS62187U (en)
JPS6167453U (en)
JPS6036585U (en) vane pump
JPH01108379U (en)
JPH0475185U (en)
JPS62141692U (en)
JPH01102491U (en)
JPS6254292U (en)
JPH02147886U (en)
JPS6241887U (en)
JPS6336678U (en)
JPS62128184U (en)
JPS61186782U (en)
JPS6330622U (en)