JPS6256137U - - Google Patents
Info
- Publication number
- JPS6256137U JPS6256137U JP14560285U JP14560285U JPS6256137U JP S6256137 U JPS6256137 U JP S6256137U JP 14560285 U JP14560285 U JP 14560285U JP 14560285 U JP14560285 U JP 14560285U JP S6256137 U JPS6256137 U JP S6256137U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- reflected power
- microwave
- processing apparatus
- generation tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560285U JPH0323304Y2 (https=) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14560285U JPH0323304Y2 (https=) | 1985-09-24 | 1985-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6256137U true JPS6256137U (https=) | 1987-04-07 |
| JPH0323304Y2 JPH0323304Y2 (https=) | 1991-05-21 |
Family
ID=31057294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14560285U Expired JPH0323304Y2 (https=) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323304Y2 (https=) |
-
1985
- 1985-09-24 JP JP14560285U patent/JPH0323304Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0323304Y2 (https=) | 1991-05-21 |