JPS6255560U - - Google Patents
Info
- Publication number
- JPS6255560U JPS6255560U JP14555785U JP14555785U JPS6255560U JP S6255560 U JPS6255560 U JP S6255560U JP 14555785 U JP14555785 U JP 14555785U JP 14555785 U JP14555785 U JP 14555785U JP S6255560 U JPS6255560 U JP S6255560U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- exhaust port
- reaction chamber
- tubular member
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 230000007613 environmental effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555785U JPS6255560U (ko) | 1985-09-24 | 1985-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14555785U JPS6255560U (ko) | 1985-09-24 | 1985-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255560U true JPS6255560U (ko) | 1987-04-06 |
Family
ID=31057207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14555785U Pending JPS6255560U (ko) | 1985-09-24 | 1985-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255560U (ko) |
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1985
- 1985-09-24 JP JP14555785U patent/JPS6255560U/ja active Pending