JPS6255340U - - Google Patents

Info

Publication number
JPS6255340U
JPS6255340U JP14675185U JP14675185U JPS6255340U JP S6255340 U JPS6255340 U JP S6255340U JP 14675185 U JP14675185 U JP 14675185U JP 14675185 U JP14675185 U JP 14675185U JP S6255340 U JPS6255340 U JP S6255340U
Authority
JP
Japan
Prior art keywords
substrate holder
substrate
thin metal
metal plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14675185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14675185U priority Critical patent/JPS6255340U/ja
Publication of JPS6255340U publication Critical patent/JPS6255340U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14675185U 1985-09-26 1985-09-26 Pending JPS6255340U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14675185U JPS6255340U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14675185U JPS6255340U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Publications (1)

Publication Number Publication Date
JPS6255340U true JPS6255340U (enrdf_load_stackoverflow) 1987-04-06

Family

ID=31059502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14675185U Pending JPS6255340U (enrdf_load_stackoverflow) 1985-09-26 1985-09-26

Country Status (1)

Country Link
JP (1) JPS6255340U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913793U (enrdf_load_stackoverflow) * 1972-05-11 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913793U (enrdf_load_stackoverflow) * 1972-05-11 1974-02-05

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