JPH0314147U - - Google Patents

Info

Publication number
JPH0314147U
JPH0314147U JP7587089U JP7587089U JPH0314147U JP H0314147 U JPH0314147 U JP H0314147U JP 7587089 U JP7587089 U JP 7587089U JP 7587089 U JP7587089 U JP 7587089U JP H0314147 U JPH0314147 U JP H0314147U
Authority
JP
Japan
Prior art keywords
holder
substrate
film forming
forming substrate
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7587089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH072608Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7587089U priority Critical patent/JPH072608Y2/ja
Publication of JPH0314147U publication Critical patent/JPH0314147U/ja
Application granted granted Critical
Publication of JPH072608Y2 publication Critical patent/JPH072608Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7587089U 1989-06-28 1989-06-28 加熱成膜用基板ホルダ Expired - Lifetime JPH072608Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7587089U JPH072608Y2 (ja) 1989-06-28 1989-06-28 加熱成膜用基板ホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7587089U JPH072608Y2 (ja) 1989-06-28 1989-06-28 加熱成膜用基板ホルダ

Publications (2)

Publication Number Publication Date
JPH0314147U true JPH0314147U (enrdf_load_stackoverflow) 1991-02-13
JPH072608Y2 JPH072608Y2 (ja) 1995-01-25

Family

ID=31616833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7587089U Expired - Lifetime JPH072608Y2 (ja) 1989-06-28 1989-06-28 加熱成膜用基板ホルダ

Country Status (1)

Country Link
JP (1) JPH072608Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH072608Y2 (ja) 1995-01-25

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