JPS6253331U - - Google Patents
Info
- Publication number
- JPS6253331U JPS6253331U JP14511685U JP14511685U JPS6253331U JP S6253331 U JPS6253331 U JP S6253331U JP 14511685 U JP14511685 U JP 14511685U JP 14511685 U JP14511685 U JP 14511685U JP S6253331 U JPS6253331 U JP S6253331U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum gauge
- ionization vacuum
- mounting structure
- inlet
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は、本考案による電離真空計取付構造の
一実施例を示す部分縦断面図、第２図は、第１図
の電離真空計の断面構造図である。
５……電離真空計、６……アースシールド。
FIG. 1 is a partial vertical sectional view showing an embodiment of the ionization vacuum gauge mounting structure according to the present invention, and FIG. 2 is a sectional view of the ionization vacuum gauge shown in FIG. 1. 5...Ionization vacuum gauge, 6...Earth shield.
Claims (1)
計への被測定ガスの入口にアースシールドを設け
たことを特徴とする電離真空計の取付構造。 A mounting structure for an ionization vacuum gauge, characterized in that an earth shield is provided at an inlet of a gas to be measured into the ionization vacuum gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511685U JPS6253331U (en) | 1985-09-25 | 1985-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14511685U JPS6253331U (en) | 1985-09-25 | 1985-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6253331U true JPS6253331U (en) | 1987-04-02 |
Family
ID=31056355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14511685U Pending JPS6253331U (en) | 1985-09-25 | 1985-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6253331U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258590A (en) * | 1975-11-10 | 1977-05-14 | Hitachi Ltd | Ion number counter device |
| JPS57199929A (en) * | 1981-06-03 | 1982-12-08 | Fujitsu Ltd | Vacuum gage for sputtering device |
-
1985
- 1985-09-25 JP JP14511685U patent/JPS6253331U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258590A (en) * | 1975-11-10 | 1977-05-14 | Hitachi Ltd | Ion number counter device |
| JPS57199929A (en) * | 1981-06-03 | 1982-12-08 | Fujitsu Ltd | Vacuum gage for sputtering device |