JPS6252929U - - Google Patents
Info
- Publication number
- JPS6252929U JPS6252929U JP14469585U JP14469585U JPS6252929U JP S6252929 U JPS6252929 U JP S6252929U JP 14469585 U JP14469585 U JP 14469585U JP 14469585 U JP14469585 U JP 14469585U JP S6252929 U JPS6252929 U JP S6252929U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- wafers
- wafer
- shape memory
- memory alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 7
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469585U JPS6252929U (en:Method) | 1985-09-21 | 1985-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14469585U JPS6252929U (en:Method) | 1985-09-21 | 1985-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6252929U true JPS6252929U (en:Method) | 1987-04-02 |
Family
ID=31055537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14469585U Pending JPS6252929U (en:Method) | 1985-09-21 | 1985-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6252929U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (en:Method) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (en:Method) * | 1989-09-21 | 1991-05-16 |
-
1985
- 1985-09-21 JP JP14469585U patent/JPS6252929U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247029U (en:Method) * | 1988-09-28 | 1990-03-30 | ||
| JPH0350324U (en:Method) * | 1989-09-21 | 1991-05-16 |