JPS6252925U - - Google Patents

Info

Publication number
JPS6252925U
JPS6252925U JP14436185U JP14436185U JPS6252925U JP S6252925 U JPS6252925 U JP S6252925U JP 14436185 U JP14436185 U JP 14436185U JP 14436185 U JP14436185 U JP 14436185U JP S6252925 U JPS6252925 U JP S6252925U
Authority
JP
Japan
Prior art keywords
electron beam
crucible
shield
replenishment
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14436185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14436185U priority Critical patent/JPS6252925U/ja
Publication of JPS6252925U publication Critical patent/JPS6252925U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14436185U 1985-09-20 1985-09-20 Pending JPS6252925U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14436185U JPS6252925U (enrdf_load_stackoverflow) 1985-09-20 1985-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14436185U JPS6252925U (enrdf_load_stackoverflow) 1985-09-20 1985-09-20

Publications (1)

Publication Number Publication Date
JPS6252925U true JPS6252925U (enrdf_load_stackoverflow) 1987-04-02

Family

ID=31054888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14436185U Pending JPS6252925U (enrdf_load_stackoverflow) 1985-09-20 1985-09-20

Country Status (1)

Country Link
JP (1) JPS6252925U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009161828A (ja) * 2008-01-09 2009-07-23 Showa Shinku:Kk 真空蒸着装置
JP2013104106A (ja) * 2011-11-15 2013-05-30 Mitsubishi Electric Corp 蒸着装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009161828A (ja) * 2008-01-09 2009-07-23 Showa Shinku:Kk 真空蒸着装置
JP2013104106A (ja) * 2011-11-15 2013-05-30 Mitsubishi Electric Corp 蒸着装置

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