JPS6251744U - - Google Patents
Info
- Publication number
- JPS6251744U JPS6251744U JP14250385U JP14250385U JPS6251744U JP S6251744 U JPS6251744 U JP S6251744U JP 14250385 U JP14250385 U JP 14250385U JP 14250385 U JP14250385 U JP 14250385U JP S6251744 U JPS6251744 U JP S6251744U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- abnormal
- message
- semiconductor
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000005856 abnormality Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 claims 6
- 230000005236 sound signal Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例に係わる半導体製造
システムを示す概略構成図、第２図は異常判定回
路及び音声合成回路の作用を説明するためのフロ
ーチヤートである。
１０……半導体装置部、２０……周辺機器部、
３０……遠隔部、１１，２１……センサ、１２…
…異常判定回路、１３……音声合成回路、１４…
…音声メモリ、１５……増幅器、１６，３６……
スピーカ。
FIG. 1 is a schematic configuration diagram showing a semiconductor manufacturing system according to an embodiment of the present invention, and FIG. 2 is a flowchart for explaining the operations of an abnormality determination circuit and a speech synthesis circuit. 10... Semiconductor device department, 20... Peripheral equipment department,
30...Remote part, 11, 21...Sensor, 12...
...Abnormality determination circuit, 13...Speech synthesis circuit, 14...
...Voice memory, 15...Amplifier, 16,36...
speaker.
Claims (1)
られた複数のセンサと、これらのセンサの検出出
力に基いて異常部位を判定する異常判定回路と、
予め定められた複数の異常メツセージを記憶して
おく記憶回路と、この記憶回路から上記判定され
た異常部位に対応する異常メツセージを読出し該
メツセージを音声信号として出力する手段と、こ
の出力された音声信号により駆動されるスピーカ
とを具備してなることを特徴とする半導体製造シ
ステム。 (2) 前記記憶回路は、前記異常メツセージを録
音された磁気テープであることを特徴とする実用
新案登録請求の範囲第１項記載の半導体製造シス
テム。 (3) 前記記憶回路は前記異常メツセージを記憶
した半導体メモリであり、前記音声信号出力手段
は音声合成ＬＳＩからなるものであることを特徴
とする実用新案登録請求の範囲第１項記載の半導
体製造システム。 (4) 前記スピーカは、前記半導体装置の内部及
び該装置とは離れた遠隔地に配設されたものであ
ることを特徴とする実用新案登録請求の範囲第１
項記載の半導体製造システム。[Scope of Claim for Utility Model Registration] (1) A plurality of sensors attached to semiconductor manufacturing equipment and its peripheral equipment, and an abnormality determination circuit that determines abnormal parts based on the detection outputs of these sensors;
a memory circuit for storing a plurality of predetermined abnormal messages; a means for reading an abnormal message corresponding to the determined abnormal region from the memory circuit and outputting the message as an audio signal; A semiconductor manufacturing system comprising: a speaker driven by a signal. (2) The semiconductor manufacturing system according to claim 1, wherein the storage circuit is a magnetic tape on which the abnormal message is recorded. (3) The semiconductor manufacturing method according to claim 1, wherein the storage circuit is a semiconductor memory that stores the abnormal message, and the audio signal output means is comprised of an audio synthesis LSI. system. (4) Utility model registration claim 1, characterized in that the speaker is disposed inside the semiconductor device and in a remote location away from the device.
The semiconductor manufacturing system described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14250385U JPS6251744U (en) | 1985-09-18 | 1985-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14250385U JPS6251744U (en) | 1985-09-18 | 1985-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251744U true JPS6251744U (en) | 1987-03-31 |
Family
ID=31051294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14250385U Pending JPS6251744U (en) | 1985-09-18 | 1985-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251744U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4898886A (en) * | 1972-03-29 | 1973-12-14 |
-
1985
- 1985-09-18 JP JP14250385U patent/JPS6251744U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4898886A (en) * | 1972-03-29 | 1973-12-14 |
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