JPS6251737U - - Google Patents
Info
- Publication number
- JPS6251737U JPS6251737U JP14221485U JP14221485U JPS6251737U JP S6251737 U JPS6251737 U JP S6251737U JP 14221485 U JP14221485 U JP 14221485U JP 14221485 U JP14221485 U JP 14221485U JP S6251737 U JPS6251737 U JP S6251737U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- counterbore
- transferred
- allow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14221485U JPS6251737U (en, 2012) | 1985-09-18 | 1985-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14221485U JPS6251737U (en, 2012) | 1985-09-18 | 1985-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251737U true JPS6251737U (en, 2012) | 1987-03-31 |
Family
ID=31050726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14221485U Pending JPS6251737U (en, 2012) | 1985-09-18 | 1985-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251737U (en, 2012) |
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1985
- 1985-09-18 JP JP14221485U patent/JPS6251737U/ja active Pending