JPS6251263U - - Google Patents

Info

Publication number
JPS6251263U
JPS6251263U JP14457485U JP14457485U JPS6251263U JP S6251263 U JPS6251263 U JP S6251263U JP 14457485 U JP14457485 U JP 14457485U JP 14457485 U JP14457485 U JP 14457485U JP S6251263 U JPS6251263 U JP S6251263U
Authority
JP
Japan
Prior art keywords
chamber
center
dust
dust meter
connection port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14457485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245802Y2 (US06633600-20031014-M00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14457485U priority Critical patent/JPH0245802Y2/ja
Publication of JPS6251263U publication Critical patent/JPS6251263U/ja
Application granted granted Critical
Publication of JPH0245802Y2 publication Critical patent/JPH0245802Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP14457485U 1985-09-20 1985-09-20 Expired JPH0245802Y2 (US06633600-20031014-M00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14457485U JPH0245802Y2 (US06633600-20031014-M00021.png) 1985-09-20 1985-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14457485U JPH0245802Y2 (US06633600-20031014-M00021.png) 1985-09-20 1985-09-20

Publications (2)

Publication Number Publication Date
JPS6251263U true JPS6251263U (US06633600-20031014-M00021.png) 1987-03-30
JPH0245802Y2 JPH0245802Y2 (US06633600-20031014-M00021.png) 1990-12-04

Family

ID=31055300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14457485U Expired JPH0245802Y2 (US06633600-20031014-M00021.png) 1985-09-20 1985-09-20

Country Status (1)

Country Link
JP (1) JPH0245802Y2 (US06633600-20031014-M00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013079867A (ja) * 2011-10-04 2013-05-02 Azbil Corp 微粒子検出装置の評価システム及び微粒子検出装置の評価方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013079867A (ja) * 2011-10-04 2013-05-02 Azbil Corp 微粒子検出装置の評価システム及び微粒子検出装置の評価方法

Also Published As

Publication number Publication date
JPH0245802Y2 (US06633600-20031014-M00021.png) 1990-12-04

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