JPS624931U - - Google Patents

Info

Publication number
JPS624931U
JPS624931U JP9468485U JP9468485U JPS624931U JP S624931 U JPS624931 U JP S624931U JP 9468485 U JP9468485 U JP 9468485U JP 9468485 U JP9468485 U JP 9468485U JP S624931 U JPS624931 U JP S624931U
Authority
JP
Japan
Prior art keywords
chamber
transfer
processing
spiral
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9468485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538595Y2 (es
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985094684U priority Critical patent/JPH0538595Y2/ja
Publication of JPS624931U publication Critical patent/JPS624931U/ja
Application granted granted Critical
Publication of JPH0538595Y2 publication Critical patent/JPH0538595Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP1985094684U 1985-06-23 1985-06-23 Expired - Lifetime JPH0538595Y2 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985094684U JPH0538595Y2 (es) 1985-06-23 1985-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985094684U JPH0538595Y2 (es) 1985-06-23 1985-06-23

Publications (2)

Publication Number Publication Date
JPS624931U true JPS624931U (es) 1987-01-13
JPH0538595Y2 JPH0538595Y2 (es) 1993-09-29

Family

ID=30958389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985094684U Expired - Lifetime JPH0538595Y2 (es) 1985-06-23 1985-06-23

Country Status (1)

Country Link
JP (1) JPH0538595Y2 (es)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735232U (es) * 1980-08-02 1982-02-24
JPS57141751U (es) * 1981-02-27 1982-09-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735232U (es) * 1980-08-02 1982-02-24
JPS57141751U (es) * 1981-02-27 1982-09-06

Also Published As

Publication number Publication date
JPH0538595Y2 (es) 1993-09-29

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