JPS62492B2 - - Google Patents
Info
- Publication number
- JPS62492B2 JPS62492B2 JP365179A JP365179A JPS62492B2 JP S62492 B2 JPS62492 B2 JP S62492B2 JP 365179 A JP365179 A JP 365179A JP 365179 A JP365179 A JP 365179A JP S62492 B2 JPS62492 B2 JP S62492B2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- resist layer
- layer
- resist
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP365179A JPS5595951A (en) | 1979-01-16 | 1979-01-16 | Production of photo mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP365179A JPS5595951A (en) | 1979-01-16 | 1979-01-16 | Production of photo mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5595951A JPS5595951A (en) | 1980-07-21 |
| JPS62492B2 true JPS62492B2 (enrdf_load_html_response) | 1987-01-08 |
Family
ID=11563369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP365179A Granted JPS5595951A (en) | 1979-01-16 | 1979-01-16 | Production of photo mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5595951A (enrdf_load_html_response) |
-
1979
- 1979-01-16 JP JP365179A patent/JPS5595951A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5595951A (en) | 1980-07-21 |
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