JPS6248658U - - Google Patents
Info
- Publication number
- JPS6248658U JPS6248658U JP14000385U JP14000385U JPS6248658U JP S6248658 U JPS6248658 U JP S6248658U JP 14000385 U JP14000385 U JP 14000385U JP 14000385 U JP14000385 U JP 14000385U JP S6248658 U JPS6248658 U JP S6248658U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- detector
- cylindrical
- holder
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14000385U JPS6248658U (cs) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14000385U JPS6248658U (cs) | 1985-09-12 | 1985-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6248658U true JPS6248658U (cs) | 1987-03-25 |
Family
ID=31046438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14000385U Pending JPS6248658U (cs) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6248658U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514683A (en) * | 1978-07-19 | 1980-02-01 | Jeol Ltd | Reflected electron detector for scan electronic microscope |
| JPS56132756A (en) * | 1980-03-19 | 1981-10-17 | Hitachi Ltd | Secondary electron detector |
-
1985
- 1985-09-12 JP JP14000385U patent/JPS6248658U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514683A (en) * | 1978-07-19 | 1980-02-01 | Jeol Ltd | Reflected electron detector for scan electronic microscope |
| JPS56132756A (en) * | 1980-03-19 | 1981-10-17 | Hitachi Ltd | Secondary electron detector |