JPS6247632B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an improvement in a ribbon crystal cutting device for cutting ribbon crystals into predetermined dimensions.

[Technical background of the invention]

Conventionally, as a ribbon crystal manufacturing apparatus, there is one disclosed in, for example, Japanese Unexamined Patent Publication No. 73481/1983. As shown in FIG. 1, this method is based on an apparatus for growing a crystal by using a die 3 having a desired shape for crystal growth, using a silicon melt 2 melted by a heating element in a crucible 1, and depending on the amount of crystal growth. A ribbon crystal growth apparatus section 5 comprising a raw material supply mechanism 4 for continuously supplying raw materials to the crucible 1, and a ribbon crystal growth apparatus section 5 for pulling up ribbon-shaped crystals, that is, ribbon crystals 6 supplied from the ribbon crystal growth apparatus section 5. a crystal pulling drive unit 8 consisting of a plurality of pairs of ribbon crystal feeding rollers 7 that rotate at a constant circumferential speed; and a laser beam 9 that cuts the ribbon crystal 6 that is continuously fed from the crystal pulling drive unit 8. The laser device 10 is composed of a high-output laser device 10 that generates
On the opposite side, the ribbon crystal 13 that was cut and fell
A storage box 14 is arranged to store the.

[Problems with background technology]

The disadvantage of this conventional device is that the cut ribbon crystals 13 are stored in pieces in the storage box 14;
When the cut ribbon crystal 13 is stored in the storage box 14, the ribbon crystal 13 is damaged or broken, resulting in a decrease in the quality of the ribbon crystal 13, and in severe cases, it becomes a defective product, reducing the yield. This is a major factor.

[Purpose of the invention]

The object of the present invention was made in view of the above-mentioned drawbacks of the conventional example, and it is possible to automatically measure the length and store ribbon crystals cut to a given length in an orderly manner, thereby preventing cracks in the ribbon crystals. Our goal is to provide better quality ribbon crystals that are free from chips and the like.

[Summary of the invention]

The ribbon crystal cutting device of the present invention includes a measuring device section that measures the length of the ribbon crystal, a cutting device section that cuts the measured ribbon crystal at a set length, and a cutting device section that cuts the measured ribbon crystal at a set length. A storage device section for vertically storing a magazine that is fed intermittently in the horizontal direction is arranged sequentially from above along the feeding path of the ribbon crystal, and sample ribbon crystals are placed between the cutting device section and the storage device section. This structure is characterized by the provision of a sample ribbon crystal storage unit for storing the ribbon crystals, which prevents the ribbon crystals from coming into contact with each other, thereby preventing defects such as cracks, chips, and scratches. It disappears.

[Embodiments of the invention]

The present invention will be described below with reference to the embodiments shown in FIGS. 2 and 3. The operation of each device section is as follows.
This will be explained in parallel with the structure of each device section.

The ribbon crystal 21 is pulled upward while growing in a crystal growth device (not shown) consisting of a crucible, die, etc., and then pulled downward as shown in the figure by a direction changing device (also not shown) consisting of a large-diameter wheel, etc. comes down to.

Further, a side plate 22 is fixedly arranged vertically in the same way as the ribbon crystal 21 that is descending, and a measuring device section 23 for measuring the length of the ribbon crystal 21 is provided on the upper part of the side plate 22. This measuring device section 23 consists of a pair of length measuring rollers 25 coated with silicone rubber 24 that hold the ribbon crystal 21 between them, and the length measuring roller 25 rotates as the ribbon crystal 21 grows. The rotational speed is detected by a rotary encoder 26 provided on the opposite side of the length measuring roller 25, and the length of the ribbon crystal 21 is measured.

Further, below the measuring device section 23, a cutting device section 27 for cutting the ribbon crystal is provided on the side plate 22. This cutting device section 27 includes an optical fiber 29 that sends a laser beam 28 for actually cutting the ribbon crystal 21, a laser scanner 30 that focuses the laser beam 28, and a motor 31 that connects the laser scanner 30 to a laser beam 28.
The ribbon crystal 2 is
a laser scanner X-axis drive mechanism 34 that drives along a horizontal guide 33 in a direction perpendicular to the feeding direction of
and a laser scanner Z-axis drive that drives the horizontal guide 34 along a vertical guide 37 parallel to the feeding direction of the ribbon crystal 21 by a feed screw 36 driven by a motor 35 in synchronization with the growth rate of the ribbon crystal 21. It consists of a mechanism 38. Then, the laser scanner 30 is started by a signal emitted from the rotary encoder 26 of the measuring device section 23, and the ribbon crystal 21 is cut at a set length. During this time, the ribbon crystal 21 continues to grow, but
Since the laser scanner 30 also moves synchronously in the vertical direction (Z-axis direction), the cut end surface of the ribbon crystal 21 can be cut at right angles to the sides.

Splash generated from the cut part during this cutting,
Vapor and the like are sucked by a dust collection chamber 39 provided on the upper surface of the horizontal guide 34 and a dust collection device (not shown).

Further, a sample ribbon crystal storage device section 40 for storing sample ribbon crystals is provided below the cutting device section 27. As shown in FIG. 4, this device section 40 transmits the rotation of a DC motor 41 to a rotating shaft 47 of a shooter 46 via a reducer 42, a shaft 43, and gears 44, 45, and moves the shooter 46 to a standby position A. The sample ribbon crystal storage position C on the ribbon crystal lowering path B is rotated. The rotation stop position of the shooter 46 is determined by a photoelectric sensor 49 for confirming the standby position and a photoelectric sensor 50 for confirming the storage position, which are arranged at fixed positions with respect to the grooved rotary plate 48 integral with the shaft 43. The motor 41
to stop. The rotating plate 48 has a transparent groove 48a.
is provided, and this transparent groove 48a is connected to the sensor 4.
Detected by 9,50.

This sample ribbon crystal storage unit 40 is arranged so that a sample ribbon crystal 21 during production can be inspected to see if it is a good product. A preliminary evaluation of the ribbon crystal 21 is performed by performing measurements, resistance measurements, etc.

Further, a storage device section 52 for storing cut ribbon crystals in a magazine 51 is provided at the lower part of the side plate 22. This storage device section 52 includes the magazine 51, which is provided with grooves 53 at regular pitches on the inner surface for storing a plurality of cut ribbon crystals in parallel;
A storage box 54 for storing ribbon crystals with defective shapes, and a magazine 51 for storing ribbon crystals after cutting.
It consists of a ribbon crystal feeding mechanism 55 that feeds the ribbon crystal inwards, a ribbon crystal final feeding mechanism 56 that feeds the ribbon crystal to the lowest end of the magazine, and a magazine moving mechanism 57 that horizontally moves the magazine 51 at a fixed pitch.

Furthermore, the ribbon crystal feeding mechanism 55 clamps the cut ribbon crystal between a pair of feeding rollers 59 coated with silicone rubber 58, and feeds the ribbon crystal by a DC servo motor 60 provided on the opposite side of one feeding roller 59. The roller 59 is driven to gently guide and insert the cut ribbon crystal into the magazine 51. This magazine 51 has two magazines in this embodiment.
When one is full, it is stored in the other. Further, in the back of this magazine 51 is the defective shape product storage box 54, so that defective ribbon crystals that do not have a constant width are stored in this box.

Further, the magazine moving mechanism 57 includes a pedestal 61
The feed screw 63 is driven by a motor 62 installed inside the
The magazine base 66 is moved at a fixed pitch along a guide 67 by rotating through a timing belt 64 and a timing pulley 65. predetermined groove 5 of
3, the magazine is moved by this magazine moving mechanism 57 in order to store the next ribbon crystal in the next concave groove 53. The span of this constant pitch movement and the stop signal are outputted by a photo sensor and a sensor plate (not shown).

Furthermore, the ribbon crystal final feed mechanism 56 is provided to prevent the ribbon crystal that has come off the feed roller 59 from falling to the lowest end of the magazine 51 under its own weight and breaking. The ribbon crystal sent by the ribbon crystal sending mechanism 55 is detected by a photo sensor 68, and after this detection, a guide bar 69 having the photo sensor 68 at its tip is driven by a motor 70 provided inside the frame 61. The mechanism of the gear 71 and the rack 72 lowers the crystal ribbon and gently guides the ribbon crystal that has come off the feed roller 59 to the lowest end of the magazine 51.

Further, the lever 73 provided in the measuring device section 23 and the ribbon crystal feeding mechanism 55 is an opening/closing operation section for each of the rollers 52 and 59.
1 is used to slide the mounting plates 74, 75 of the left rollers 25, 59 to the left to open the gap between the rollers.

In the above embodiments, the present apparatus is used in conjunction with a crystal growth apparatus, but the present invention is not limited to this and may be used alone.

Further, although the laser beam 28 is sent through the optical fiber 29, the laser oscillator may be directly connected to the laser scanner 30.

Further, although the rotary encoder 26 is used to measure the length of the ribbon crystal 21, other measuring instruments capable of measuring the length may be used.

〔Effect of the invention〕

According to the present invention, a ribbon crystal measuring device section;
By sequentially arranging the cutting device section and the storage device section from above along the feeding path of the ribbon crystal,
Since the cut ribbon crystals can be stored continuously in the same direction as the feeding direction, the cut ribbon crystals are stored in the magazine which is fed horizontally at regular pitches in the storing device section. Therefore, it is possible to avoid mutual contact between the ribbon crystals, which eliminates cracks, chips, scratches, etc. of the ribbon crystals, and improves the yield and the quality of the product. Additionally, since the measuring device, cutting device, and storage device are integrated, unmanned operation is possible, and productivity is improved. In addition, since a sample ribbon crystal storage device section is provided between the cutting device section and the storage device section, ribbon crystal samples are collected in a timely manner in this sample ribbon crystal storage device section, and the quality of the ribbon crystals being produced is inspected. be able to.

[Brief explanation of the drawing]

Fig. 1 is a side sectional view showing a conventional example, Fig. 2 is a perspective view showing an embodiment of the present invention, Fig. 3 is a side view thereof, and Fig. 4 is a perspective view of the sample ribbon crystal storage device. be. 21... Ribbon crystal, 23... Measuring device section, 2
7... Cutting device section, 40... Sample ribbon crystal storage device section, 51... Magazine, 52... Storage device section.

Claims (1)

[Claims] 1. A measuring device unit that measures the length of a ribbon crystal;
A cutting device section that cuts the measured ribbon crystal to a set length, and a storage device section that stores the cut ribbon crystal vertically in a magazine that is fed intermittently in the horizontal direction. A ribbon crystal cutting device characterized in that a sample ribbon crystal storage device section is disposed sequentially from above along the feeding path and stores the sample ribbon crystal between the cutting device section and the storage device section. . 2 The measuring device section that measures the length of the ribbon crystal is
The ribbon crystal cutting device according to claim 1, characterized in that it uses a rotary encoder. 3. The cutting device section that cuts the ribbon crystal includes an optical fiber that sends a laser beam, a laser scanner that focuses the laser beam, and a laser scanner X-axis drive mechanism that drives the laser scanner in a direction perpendicular to the feeding direction of the ribbon crystal. Claim 1 or 2 comprises a laser scanner Z-axis drive mechanism that drives the ribbon crystal parallel to the feeding direction in synchronization with the growth rate of the ribbon crystal.
Ribbon crystal cutting device as described in Section 1. 4 The storage device section that stores the cut ribbon crystals includes a magazine that stores a plurality of ribbon crystals, a storage box that stores ribbon crystals with defective shapes, and sends the cut ribbon crystals to the magazine. Claims 1 to 5 are characterized in that the apparatus comprises a ribbon crystal feeding mechanism, a ribbon crystal final feeding mechanism that feeds the ribbon crystal to the lowest end of the magazine, and a magazine moving mechanism that moves the magazine at a fixed pitch. The ribbon crystal cutting device according to any one of Item 3.