JPS6247125U - - Google Patents
Info
- Publication number
- JPS6247125U JPS6247125U JP13960485U JP13960485U JPS6247125U JP S6247125 U JPS6247125 U JP S6247125U JP 13960485 U JP13960485 U JP 13960485U JP 13960485 U JP13960485 U JP 13960485U JP S6247125 U JPS6247125 U JP S6247125U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vertically moving
- heat treatment
- moving beam
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Reciprocating Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13960485U JPS6247125U (en:Method) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13960485U JPS6247125U (en:Method) | 1985-09-12 | 1985-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6247125U true JPS6247125U (en:Method) | 1987-03-23 |
Family
ID=31045665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13960485U Pending JPS6247125U (en:Method) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247125U (en:Method) |
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1985
- 1985-09-12 JP JP13960485U patent/JPS6247125U/ja active Pending