JPS6245834U - - Google Patents
Info
- Publication number
- JPS6245834U JPS6245834U JP1985137939U JP13793985U JPS6245834U JP S6245834 U JPS6245834 U JP S6245834U JP 1985137939 U JP1985137939 U JP 1985137939U JP 13793985 U JP13793985 U JP 13793985U JP S6245834 U JPS6245834 U JP S6245834U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- wafer
- support plate
- semiconductor device
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985137939U JPS6245834U (enExample) | 1985-09-09 | 1985-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985137939U JPS6245834U (enExample) | 1985-09-09 | 1985-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6245834U true JPS6245834U (enExample) | 1987-03-19 |
Family
ID=31042460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985137939U Pending JPS6245834U (enExample) | 1985-09-09 | 1985-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6245834U (enExample) |
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1985
- 1985-09-09 JP JP1985137939U patent/JPS6245834U/ja active Pending