JPS6244438U - - Google Patents

Info

Publication number
JPS6244438U
JPS6244438U JP13542785U JP13542785U JPS6244438U JP S6244438 U JPS6244438 U JP S6244438U JP 13542785 U JP13542785 U JP 13542785U JP 13542785 U JP13542785 U JP 13542785U JP S6244438 U JPS6244438 U JP S6244438U
Authority
JP
Japan
Prior art keywords
reaction tube
heat treatment
positioning structure
vertical semiconductor
semiconductor heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13542785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13542785U priority Critical patent/JPS6244438U/ja
Publication of JPS6244438U publication Critical patent/JPS6244438U/ja
Pending legal-status Critical Current

Links

JP13542785U 1985-09-04 1985-09-04 Pending JPS6244438U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13542785U JPS6244438U (fi) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13542785U JPS6244438U (fi) 1985-09-04 1985-09-04

Publications (1)

Publication Number Publication Date
JPS6244438U true JPS6244438U (fi) 1987-03-17

Family

ID=31037599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13542785U Pending JPS6244438U (fi) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPS6244438U (fi)

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