JPS6244433U - - Google Patents

Info

Publication number
JPS6244433U
JPS6244433U JP13564985U JP13564985U JPS6244433U JP S6244433 U JPS6244433 U JP S6244433U JP 13564985 U JP13564985 U JP 13564985U JP 13564985 U JP13564985 U JP 13564985U JP S6244433 U JPS6244433 U JP S6244433U
Authority
JP
Japan
Prior art keywords
ring
block body
shaped
substrate
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13564985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135649U priority Critical patent/JPH0325402Y2/ja
Publication of JPS6244433U publication Critical patent/JPS6244433U/ja
Application granted granted Critical
Publication of JPH0325402Y2 publication Critical patent/JPH0325402Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985135649U 1985-09-06 1985-09-06 Expired JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135649U JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-06 1985-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135649U JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-06 1985-09-06

Publications (2)

Publication Number Publication Date
JPS6244433U true JPS6244433U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-17
JPH0325402Y2 JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-03

Family

ID=31038036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135649U Expired JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-06 1985-09-06

Country Status (1)

Country Link
JP (1) JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112691A (ja) * 1983-11-18 1985-06-19 Anelva Corp 分子線エピタキシャル成長装置用の基板保持装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112691A (ja) * 1983-11-18 1985-06-19 Anelva Corp 分子線エピタキシャル成長装置用の基板保持装置

Also Published As

Publication number Publication date
JPH0325402Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-03

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