JPS6244355U - - Google Patents

Info

Publication number
JPS6244355U
JPS6244355U JP13293185U JP13293185U JPS6244355U JP S6244355 U JPS6244355 U JP S6244355U JP 13293185 U JP13293185 U JP 13293185U JP 13293185 U JP13293185 U JP 13293185U JP S6244355 U JPS6244355 U JP S6244355U
Authority
JP
Japan
Prior art keywords
convex portions
substrate
concave
light
recognition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13293185U
Other languages
English (en)
Other versions
JPH0138698Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13293185U priority Critical patent/JPH0138698Y2/ja
Publication of JPS6244355U publication Critical patent/JPS6244355U/ja
Application granted granted Critical
Publication of JPH0138698Y2 publication Critical patent/JPH0138698Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案の実施例による認識記号読み取
り装置を示す斜視図、第2図は同実施例による認
識記号付き基板の加工を示す斜視図、第3図aは
同実施例による認識記号加工におけるレーザビー
ムの軌跡を示す図、第3図bは同図aに基づいて
形成された凹凸部を示す平面図、及び第4図は同
実施例による認識記号付き基板を示す斜視図であ
る。 1……基板、2……端面、10……凹部、11
……凸部、13……認識記号読み取り装置、14
……レーザ発振器、15……レーザビーム、17
……正反射光、18……受光器。

Claims (1)

    【実用新案登録請求の範囲】
  1. 認識記号を表わす粗面状の凹部と鏡面状の凸部
    とを基板の端面に互いに隣接して複数林立形成し
    、前記凹凸部にレーザビームを照射するレーザ発
    振器と前記凸部で正反射光を受光する受光器との
    両者と、前記基板とのうち、何れか一方を前記凹
    凸部と交叉する方向に移動する手段を備えている
    ことを特徴とする認識記号読み取り装置。
JP13293185U 1985-08-30 1985-08-30 Expired JPH0138698Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13293185U JPH0138698Y2 (ja) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13293185U JPH0138698Y2 (ja) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6244355U true JPS6244355U (ja) 1987-03-17
JPH0138698Y2 JPH0138698Y2 (ja) 1989-11-20

Family

ID=31032776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13293185U Expired JPH0138698Y2 (ja) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH0138698Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107613A (ja) * 2008-10-29 2010-05-13 Tosoh Corp フォトマスク用基板およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010107613A (ja) * 2008-10-29 2010-05-13 Tosoh Corp フォトマスク用基板およびその製造方法

Also Published As

Publication number Publication date
JPH0138698Y2 (ja) 1989-11-20

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