JPS6244065U - - Google Patents
Info
- Publication number
- JPS6244065U JPS6244065U JP13614285U JP13614285U JPS6244065U JP S6244065 U JPS6244065 U JP S6244065U JP 13614285 U JP13614285 U JP 13614285U JP 13614285 U JP13614285 U JP 13614285U JP S6244065 U JPS6244065 U JP S6244065U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- evaporation
- vacuum pump
- vacuum
- evacuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 3
- 238000007738 vacuum evaporation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614285U JPS6244065U (nl) | 1985-09-05 | 1985-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13614285U JPS6244065U (nl) | 1985-09-05 | 1985-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6244065U true JPS6244065U (nl) | 1987-03-17 |
Family
ID=31038984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13614285U Pending JPS6244065U (nl) | 1985-09-05 | 1985-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244065U (nl) |
-
1985
- 1985-09-05 JP JP13614285U patent/JPS6244065U/ja active Pending