JPS6244064U - - Google Patents

Info

Publication number
JPS6244064U
JPS6244064U JP13308485U JP13308485U JPS6244064U JP S6244064 U JPS6244064 U JP S6244064U JP 13308485 U JP13308485 U JP 13308485U JP 13308485 U JP13308485 U JP 13308485U JP S6244064 U JPS6244064 U JP S6244064U
Authority
JP
Japan
Prior art keywords
raw material
metal
vacuum vessel
material supply
holding means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13308485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13308485U priority Critical patent/JPS6244064U/ja
Publication of JPS6244064U publication Critical patent/JPS6244064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13308485U 1985-09-02 1985-09-02 Pending JPS6244064U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13308485U JPS6244064U (en, 2012) 1985-09-02 1985-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13308485U JPS6244064U (en, 2012) 1985-09-02 1985-09-02

Publications (1)

Publication Number Publication Date
JPS6244064U true JPS6244064U (en, 2012) 1987-03-17

Family

ID=31033072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13308485U Pending JPS6244064U (en, 2012) 1985-09-02 1985-09-02

Country Status (1)

Country Link
JP (1) JPS6244064U (en, 2012)

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