JPS6243359U - - Google Patents

Info

Publication number
JPS6243359U
JPS6243359U JP1985135241U JP13524185U JPS6243359U JP S6243359 U JPS6243359 U JP S6243359U JP 1985135241 U JP1985135241 U JP 1985135241U JP 13524185 U JP13524185 U JP 13524185U JP S6243359 U JPS6243359 U JP S6243359U
Authority
JP
Japan
Prior art keywords
pellicle
adhesive layer
support frame
flexible sheet
blister
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985135241U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123138Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985135241U priority Critical patent/JPH0123138Y2/ja
Publication of JPS6243359U publication Critical patent/JPS6243359U/ja
Application granted granted Critical
Publication of JPH0123138Y2 publication Critical patent/JPH0123138Y2/ja
Expired legal-status Critical Current

Links

JP1985135241U 1985-09-04 1985-09-04 Expired JPH0123138Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985135241U JPH0123138Y2 (fr) 1985-09-04 1985-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985135241U JPH0123138Y2 (fr) 1985-09-04 1985-09-04

Publications (2)

Publication Number Publication Date
JPS6243359U true JPS6243359U (fr) 1987-03-16
JPH0123138Y2 JPH0123138Y2 (fr) 1989-07-17

Family

ID=31037239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985135241U Expired JPH0123138Y2 (fr) 1985-09-04 1985-09-04

Country Status (1)

Country Link
JP (1) JPH0123138Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120148U (fr) * 1988-02-09 1989-08-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120148U (fr) * 1988-02-09 1989-08-15

Also Published As

Publication number Publication date
JPH0123138Y2 (fr) 1989-07-17

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