JPS6243276Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a hot isostatic press apparatus having a high-temperature furnace chamber surrounded by a heat insulating layer and a heater within a high-pressure vessel.

[Conventional technology]

Referring to FIG. 3, this type of hot isostatic press apparatus includes a vertical pressure-resistant cylinder 4 whose top portion is hermetically closed by an upper lid 1. A lower outer cover 2 is detachably fitted to the bottom of the pressure cylinder 4, and a lower inner cover 3 is detachably fitted to the inside of the lower outer cover 2. A high pressure vessel is thus formed.

In addition, on the upper surface of the lower outer lid 2, there is an inverted cup-shaped heat insulating layer 5.
is installed. A heating device including a heater 6 and a thermocouple 7 is provided inside the heat insulating layer 5. In this way, a processing chamber in which the sample stage 11 is positioned is configured.

Here, a heat insulating layer 5, a heater 6 and a thermocouple 7
is installed on a support stand 8. Also, the lower outer lid 2
are provided with heater electrode outlets 9a, 9b and a thermocouple outlet 10a. and heater 6
The connection of the thermocouple 7 to the heater electrode outlets 9a and 9b is made using a connecting wire 9c, while the connection of the thermocouple 7 to the thermocouple outlet 10a is made using a connecting wire 10b. (For example, Japanese Patent Publication No. 58-57481).

[Problem that the invention attempts to solve]

However, the task of replacing the heater in the hot isostatic press machine shown in Figure 3 is difficult due to the small working space, the fact that the heat insulating layer itself is heavy, and the work is carried out below it. There is a safety problem, and furthermore, it is complicated to attach and detach the heater 6 and the heat insulating layer 5 support, as well as the electrodes and thermocouples, leading to problems such as disconnection during work and damage to the heater due to impact. Ta.

Therefore, an object of the present invention is to provide a hot isostatic press apparatus in which the heater, thermocouple, and heat insulating layer can be easily attached and detached.

[Means for solving problems]

According to the present invention, there is provided a high-pressure container formed by a vertical pressure-resistant cylinder whose top is hermetically closed by an upper lid and a lower lid that can be removably fitted to the bottom of the cylinder, and the lower lid. In a hot isostatic press device configured with a processing chamber installed on the upper surface, housed in a high-pressure container, and surrounded by an inverted cup-shaped heat insulating layer with a built-in heating device inside, the lower lid includes: It is composed of an annular outer lid 2a for mounting and holding an inverted cup-shaped heat insulating layer, a heating device, and a thermocouple, and an inner lid 2b that is removably fitted to the annular outer lid. An annular insulating support base in which a first connector is installed toward the bottom surface is provided at the lower end of the heat insulating layer, and the heat insulating layer 5
A metal tip 8b covering the connector is fixed to the support base 8a, and a second connector corresponding to the first connector is installed in the upper part of the annular outer lid, facing upward, and leads are pulled out. A hot isostatic pressing device is obtained.

〔Example〕

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below using embodiments with reference to the drawings.

FIG. 1 shows an internal schematic diagram of a high-pressure vessel in one embodiment of the present invention. Heater 6, insulation layer 5
And the thermocouple 7 is arranged on the support stand 8a. The support stand 8a is connected to a joint pedestal 8c installed on the lower outer lid 2 of the high-pressure container.

FIG. 2 shows an enlarged view of the support stand 8a and the joint pedestal 8c. With reference to FIGS. 1 and 2, the support stand 8
A heater 6 to which a heater connection pin terminal 13 is connected is installed together with a heater support rod 12 on top a. The thermocouple 7 is installed on a support base 8a through a protective tube 7a together with a seal tube 7b, and is connected to a thermocouple connecting pin terminal 14.

A heat insulating layer 5 made of fiber and metal chips such as molybdenum, Inconel, stainless steel, and graphite is fixed on a heat insulating layer support 15 and supported on a support 8.
installed on a. Furthermore, the support base 8a is surrounded by a metal tip 8b made of stainless steel or the like, and the screw 2 is
It is fixed at 4.

With such a furnace internal structure, it is possible to handle the heater 6, the heat insulating layer 5, and the thermocouple 7 as a single unit consisting of the support stand 8a and the outermost metal tip 8b.
The heater, heat insulation layer, etc. can be easily replaced.

On the other hand, a heater connection pin receiver 16 and a thermocouple connection pin receiver 17 are incorporated in the joint pedestal 8c. A heater connection pin terminal 13 is fitted and connected to the heater connection pin receiver 16, and a thermocouple connection pin terminal 14 is fitted and connected to the thermocouple connection pin receiver 17. Such a joint pedestal 8c is the lower outer cover 2.
It is fixed to the joint pedestal fixing bolt 25. Furthermore, the heater connection pin receiver 16 has a heater connection wire 1.
8 is connected, and a thermocouple compensation lead wire 19 is connected to the thermocouple connection pin receiver 17.

Note that 20, 21, 22, and 23 are insulating tubes.

[Effect of idea]

As mentioned above, according to the hot isostatic press device of the present invention, the heater, thermocouple, and heat insulating layer can be easily installed and removed, so that replacing and repairing them can be performed easily and quickly, making it convenient. It is. In addition, by fixing the metal tip 8b covering the heat insulating layer 5 to the support base 8b, the heat insulating layer 6 containing the heater 6 etc. and the first connector 13 can be connected.
14 can be handled as an integrated unit.
By picking up the metal cup 8b itself,
Stable installation and removal work can be performed extremely easily, and maintenance is also excellent. Furthermore, since electrical connections such as the heater 6 are made using the first and second connectors 13, 14, 16 and 17, the connection and disconnection work can be done smoothly and quickly. can be executed. Furthermore, the above-mentioned effects combine to allow the above-mentioned installation and removal operations to be performed more quickly and smoothly. Moreover, since the metal tip 8b can be picked up to perform electrical connection and disconnection work for extremely fragile heaters and the like that are easily damaged by shakes due to vibrations, there is no need to worry about excessive vibrations occurring during such work. Therefore, it is possible to prevent damage to the heater etc. due to vibration. this is,
This is particularly effective when using a heater made of Mo or graphite.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram of the internal structure of a high-pressure furnace of an embodiment of the hot isostatic press device according to the present invention, Fig. 2 is an enlarged view showing a part of Fig. 1 in an exploded state, and Fig. 3 is a diagram of the conventional example. It is a schematic diagram of the internal structure of a high-pressure furnace. 1...Top lid, 2...Lower outer cover, 3...Lower inner cover, 4
...Pressure cylinder, 5...Heat insulation layer, 6...Heater, 7...Thermocouple, 8a...Support stand, 8b...
Metal tip, 8c...Joining pedestal, 11...Sample support stand, 13...Heater connection pin terminal, 14...
Thermocouple connection pin terminal, 16... Heater connection pin terminal receiver, 17... Thermocouple connection pin terminal receiver.

Claims (1)

[Claims for Utility Model Registration] A high-pressure container formed by a vertical pressure-resistant cylinder 4 whose top is hermetically closed by an upper lid 1 and a lower lid that can be detachably fitted and attached to the bottom of the cylinder 4. In a hot isostatic press device, the processing chamber is installed on the upper surface of the lower lid, is housed in a high-pressure container, and is surrounded by an inverted cup-shaped heat insulating layer 5 having a built-in heating device 6 inside. , the lower lid has an annular outer lid 2 on which an inverted cup-shaped heat insulating layer 5, a heating device 6, and a thermocouple 7 are mounted and held.
a, and an inner cover 2b which is removably fitted to the annular outer cover 2a and has a sample support stand mounted thereon;
An annular insulating support base 8a in which parts 3 and 14 are installed facing downward is provided at the lower end of the heat insulating layer 5, and further, the heater 6, the heat insulating layer 5 and the thermocouple 7 are integrally formed as a replacement unit. For this purpose, a metal tip 8b is provided that covers the heat insulating layer 5 and is fixed to the outer periphery of the support base 8a, and an insulating joint pedestal 8 is provided on the top of the annular outer lid 2a.
c, and a second connector 1 corresponding to the first connectors 13 and 14 is attached to the insulating joint pedestal 8c.
A hot isostatic press device characterized in that parts 6 and 17 are assembled facing upward and the leads are pulled out.