JPS6241735U - - Google Patents
Info
- Publication number
- JPS6241735U JPS6241735U JP13269785U JP13269785U JPS6241735U JP S6241735 U JPS6241735 U JP S6241735U JP 13269785 U JP13269785 U JP 13269785U JP 13269785 U JP13269785 U JP 13269785U JP S6241735 U JPS6241735 U JP S6241735U
- Authority
- JP
- Japan
- Prior art keywords
- conveyor
- elevating
- unloading
- rotary conveyor
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 description 2
Landscapes
- Stacking Of Articles And Auxiliary Devices (AREA)
- De-Stacking Of Articles (AREA)
Description
第１図は本考案の実施例の要部平面図、第２図
は第１図の―線における断面図、第３図は本
考案を適用したウエハ研磨装置の正面図、第４図
はその平面図である。
１：ウエハ搬入装置本体、２：研磨装置本体、
３：ウエハ搬出装置本体、４：ウエハ搬送装置、
１１：ウエハ収納ケース、１２：送り出しコンベ
ア、１３：回転コンベア。
Fig. 1 is a plan view of the main part of an embodiment of the present invention, Fig. 2 is a sectional view taken along the line - - in Fig. 1, Fig. 3 is a front view of a wafer polishing apparatus to which the present invention is applied, and Fig. 4 is the same. FIG. 1: Wafer loading device main body, 2: Polishing device main body,
3: Wafer unloading device main body, 4: Wafer transport device,
11: Wafer storage case, 12: Sending conveyor, 13: Rotating conveyor.
Claims (1)
と、回転コンベアの接触駆動により回転運動する
搬入、搬出コンベアと、垂直軸の回りに９０度回
転および搬送方向を切り換えると共に前記搬入、
搬出コンベアへ駆動を伝える回転コンベアを備え
たことを特徴とする基板、板状体の搬入、搬出装
置。 an elevating device for elevating and lowering a case for storing conveyed items; an inlet/outlet conveyor that rotates by contact drive of a rotary conveyor;
A device for loading and unloading substrates and plate-shaped objects, characterized by being equipped with a rotary conveyor that transmits drive to an unloading conveyor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13269785U JPS6241735U (en) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13269785U JPS6241735U (en) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6241735U true JPS6241735U (en) | 1987-03-12 |
Family
ID=31032328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13269785U Pending JPS6241735U (en) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6241735U (en) |
-
1985
- 1985-08-29 JP JP13269785U patent/JPS6241735U/ja active Pending
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