JPS6241703A - Sulfuric acid concentration apparatus - Google Patents

Sulfuric acid concentration apparatus

Info

Publication number
JPS6241703A
JPS6241703A JP17961185A JP17961185A JPS6241703A JP S6241703 A JPS6241703 A JP S6241703A JP 17961185 A JP17961185 A JP 17961185A JP 17961185 A JP17961185 A JP 17961185A JP S6241703 A JPS6241703 A JP S6241703A
Authority
JP
Japan
Prior art keywords
sulfuric acid
concentration
tank
connecting pipe
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17961185A
Other languages
Japanese (ja)
Inventor
Tsugio Shimono
下野 次男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17961185A priority Critical patent/JPS6241703A/en
Publication of JPS6241703A publication Critical patent/JPS6241703A/en
Pending legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)

Abstract

PURPOSE:To prevent generation of sulfur trioxide and reduce contamination, by covering a sulfuric acid concentration tank and a connection pipe thereof to a cooling part with a heat insulating material. CONSTITUTION:A sulfuric acid concentration apparatus formed from a single or plural concentration tanks containing undiluted sulfuric acid, heating device, cooling device for condensing the generated vapor, receiving tank for collecting the condensate and connection pipe with a cock. The above-mentioned connection pipe is provided between the concentration tanks and the cooling part and covered with a heat insulating material.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は硫酸の蒸発濃縮装置に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to an apparatus for evaporating and concentrating sulfuric acid.

(従来の技術) 電子工業等の各分野において硫酸の高純度化が求められ
、それに伴なって硫酸の純度評価技術の高度化が必要に
なってきた。硫酸に含有される不純物濃度の分析評価は
各種の分光分析装置で高感度に行えるが、硫酸を直接に
分析装置に導入して分析するのは困難で、装置に導入す
る前にマトリックスを分離する必要がある。硫酸の場合
、一般に、蒸発濃縮法でマトリックスを分離除去し、蒸
気残渣を純水で溶解後、不純物分析を行っている。
(Prior Art) High purity of sulfuric acid is required in various fields such as the electronic industry, and as a result, it has become necessary to improve the technology for evaluating the purity of sulfuric acid. The concentration of impurities contained in sulfuric acid can be analyzed and evaluated with high sensitivity using various spectroscopic analyzers, but it is difficult to directly introduce sulfuric acid into an analyzer for analysis, and the matrix must be separated before introducing it into the analyzer. There is a need. In the case of sulfuric acid, the matrix is generally separated and removed by evaporation concentration, the vapor residue is dissolved in pure water, and then impurity analysis is performed.

従来、硫酸の蒸発濃縮法は、白金製もしくは石英製の蒸
発皿に硫酸原液を入れ、加熱装置で硫酸の沸点(約31
7°C)以上に加熱して行うだけの簡単なものだった。
Conventionally, in the evaporative concentration method of sulfuric acid, a sulfuric acid stock solution is placed in an evaporating dish made of platinum or quartz, and heated to the boiling point of sulfuric acid (approximately 31
It was as simple as heating it above 7°C.

従来の真空蒸留装置でも蒸発濃縮が行えるが、その装置
例を第4図に示す。硫酸原液2を濃縮槽1に入れ、加熱
装置3で加熱し、蒸気を冷却水の出入口9.10を有す
る冷却部8で冷却して凝縮させ受槽工2で保持する構造
を有しており、装置内は減圧用側管11に付いている減
圧口13を介して真空引きされ、濃縮槽1と冷却部8を
連結する連結管26には、キャピラリー27と温度計2
8が取り付けられるものだった。
Although evaporation and concentration can be carried out using a conventional vacuum distillation apparatus, an example of such apparatus is shown in FIG. It has a structure in which a sulfuric acid stock solution 2 is put into a concentrating tank 1, heated by a heating device 3, and the steam is cooled and condensed in a cooling section 8 having a cooling water inlet/outlet 9.10 and held in a receiving tank 2. The inside of the device is evacuated through the pressure reduction port 13 attached to the side pipe 11 for pressure reduction, and a capillary 27 and a thermometer 2 are connected to the connection pipe 26 that connects the concentration tank 1 and the cooling section 8.
8 could be attached.

(発明が解決しようとする問題点) 硫酸は290°Cで三酸化イオウを発生して約317°
Cで沸騰する。従って、従来の硫酸の濃縮法は、有毒な
三酸化イオウが発生する、長時間を要する、あるいは開
放系であるためコンタミネーションが起こり易いなどの
欠点を有していた。また、第4図の真空蒸留装置は、連
結管26の構造上、高沸点である硫酸の蒸留効率が悪い
、複数の濃縮槽を設置できない、突沸防止のため設けて
いるキャピラリー27から外部の空気を原液内に導入す
るためコンタミネーションを起こし易い、蒸発濃縮後、
濃縮槽をを外しにくいなどの欠点を有していた。また、
比較的低沸点の物質の真空蒸発濃縮装置としてロータリ
ーエバポレーターが用いられているが、回転部分の材質
等の問題で、高沸点である硫酸への適用は困難だった。
(Problem to be solved by the invention) Sulfuric acid generates sulfur trioxide at 290°C and
It boils at C. Therefore, conventional sulfuric acid concentration methods have disadvantages such as generating toxic sulfur trioxide, requiring a long time, and being an open system, which is likely to cause contamination. In addition, the vacuum distillation apparatus shown in FIG. 4 has poor distillation efficiency for sulfuric acid, which has a high boiling point, due to the structure of the connecting pipe 26, it is not possible to install multiple concentration tanks, and external air is drawn from the capillary 27 provided to prevent bumping. After evaporation and concentration, which is likely to cause contamination because it is introduced into the stock solution,
It had drawbacks such as the difficulty of removing the concentration tank. Also,
A rotary evaporator is used as a vacuum evaporation concentration device for substances with a relatively low boiling point, but it has been difficult to apply it to sulfuric acid, which has a high boiling point, due to problems such as the material of the rotating parts.

本発明の目的は、この様な従来法および従来装置の欠点
を除去せしめて、二酸化イオウの発生がなく、迅速に、
しかもコンタミネーションを起こすことなく単一もしく
は複数の硫酸試料の蒸発濃縮が行える硫酸濃縮装置を提
供することにある。
The object of the present invention is to eliminate the drawbacks of the conventional methods and devices, and to quickly, without generating sulfur dioxide,
Moreover, it is an object of the present invention to provide a sulfuric acid concentrator that can evaporate and concentrate a single or multiple sulfuric acid samples without causing contamination.

(問題点を解決するための手段) 本発明によれば、硫酸原液を入れた濃縮槽を加熱装置で
加熱し、発生する蒸気を冷却部で凝縮させ、受槽に)廷
縮液を補集する構造を有する真空蒸発濃縮装置において
、単一もしくは複数の濃縮槽を具備し、該濃縮槽、およ
び該濃縮槽と冷却部の間に設けたコック付の連結管の一
部を保温材でおおう構造を有することを特徴とする硫酸
濃縮装置が得られる。
(Means for Solving the Problems) According to the present invention, a concentrating tank containing a sulfuric acid stock solution is heated by a heating device, the generated steam is condensed in a cooling section, and the condensed liquid is collected in a receiving tank. A vacuum evaporation concentration device having a structure that includes a single or multiple concentration tanks, and a structure in which the concentration tank and a part of the connecting pipe with a cock provided between the concentration tank and the cooling section are covered with a heat insulating material. A sulfuric acid concentrator is obtained, which is characterized by having:

(作用) 硫酸は真空減圧下で二酸化イオウを発生することなく、
迅速に蒸発する。連結管の改良と、さらに外気接触部分
を保温材でおおうことにより、効率良く蒸発濃縮が行え
る。硫酸は水分がなければ加熱しても突沸しないため、
突沸防止用キャピラリーは必要なく、装置を密閉形にで
き外部からのコンタミネーションを低減できる。
(Action) Sulfuric acid does not generate sulfur dioxide under vacuum and reduced pressure.
Evaporates quickly. Efficient evaporation and concentration can be achieved by improving the connecting pipe and covering the parts that come in contact with outside air with heat insulating material. Sulfuric acid does not bump when heated without water, so
There is no need for a capillary to prevent bumping, and the device can be sealed, reducing contamination from the outside.

(実施例) 以下、本発明について一実施例を示す図面を参照して説
明する。第1図は実施例の装置を示す側面図である。濃
縮槽1に硫酸原液2を入れ加熱装置3で加熱して蒸発さ
せる。硫酸蒸気は連結管5を通って冷却部8に入り凝縮
する。凝縮液は減圧用側管11を通って受槽12に補集
される。装置内は、減圧用側管11に付いている減圧口
13を介して真空減圧されている。当該装置は、硫酸の
蒸留効率を高めるため連結管5を硫酸蒸気が通過し易い
構造にするとともに、濃縮槽1と連結管5の一部を保温
材4でおおっている。
(Example) Hereinafter, the present invention will be described with reference to the drawings showing one example. FIG. 1 is a side view showing the apparatus of the embodiment. A sulfuric acid stock solution 2 is put into a concentration tank 1 and heated by a heating device 3 to evaporate it. The sulfuric acid vapor enters the cooling section 8 through the connecting pipe 5 and is condensed. The condensed liquid passes through the depressurizing side pipe 11 and is collected in the receiving tank 12 . The inside of the apparatus is evacuated via a pressure reduction port 13 attached to a side pipe 11 for pressure reduction. In this apparatus, in order to increase the efficiency of sulfuric acid distillation, the connecting pipe 5 is structured so that sulfuric acid vapor can easily pass therethrough, and a part of the concentrating tank 1 and the connecting pipe 5 are covered with a heat insulating material 4.

また、装置構成材からの溶出によるコンタミネーション
を防ぐために、濃縮槽1、連結管5は石英製のものを用
いている。蒸発濃縮後、濃縮槽1をはずし、当該槽内の
蒸発残渣をピペット等で補集して不純物分析に供するが
、濃縮槽1をはずし易くするため連結管5に2つのコッ
クを具備している。すなわち、濃縮槽1をはずす場合、
凝縮液の逆流を防ぐため、先ずコツクロを閉め、次にコ
ック7を開けて大気圧にした後はずす。
In addition, in order to prevent contamination due to elution from equipment constituent materials, the concentration tank 1 and the connecting pipe 5 are made of quartz. After evaporation and concentration, the concentration tank 1 is removed, and the evaporation residue in the tank is collected with a pipette or the like and used for impurity analysis. In order to make it easier to remove the concentration tank 1, the connecting pipe 5 is equipped with two cocks. . That is, when removing the concentration tank 1,
To prevent the condensate from flowing back, first close the cap, then open the cock 7 to bring it to atmospheric pressure, and then remove it.

当該装置により、三酸化イオウがほとんど発生すること
なく、150m1/H程度の蒸留速度で濃縮が行え、従
来法および従来装置より数倍〜30倍程変進速化が図れ
た。また、コンタミネーション低減により、黒鉛炉原子
吸光法での分析において表に示す検出下限値が達成され
た。
With this device, concentration could be carried out at a distillation rate of about 150 ml/H with almost no sulfur trioxide being generated, and the rate was several to 30 times faster than the conventional method and device. Furthermore, due to the reduction of contamination, the lower limit of detection shown in the table was achieved in analysis using graphite furnace atomic absorption spectrometry.

第1図の濃縮槽1と連結管5の部分の他の実施例の斜視
図を第2図と第3図に示す。第2図の装置は連結管16
が2つに分岐し、2個の濃縮槽14,15を具備できる
構造を有している。連結管の分岐の数を増すことにより
3個以上の濃縮槽が具備できる。この様に複数個の濃縮
槽が具備できることにより複数の硫酸試料の蒸発濃縮が
同時に行え、処理時間を著しく軽減できる。
A perspective view of another embodiment of the concentration tank 1 and connecting pipe 5 shown in FIG. 1 is shown in FIGS. 2 and 3. The device shown in Figure 2 is a connecting pipe 16.
It has a structure in which it is branched into two and can be provided with two concentration tanks 14 and 15. Three or more concentration tanks can be provided by increasing the number of branches of the connecting pipe. Since a plurality of concentration tanks can be provided in this way, a plurality of sulfuric acid samples can be evaporated and concentrated simultaneously, and the processing time can be significantly reduced.

第3図は他の実施例である。当該装置は連結管21の分
岐した部分にコックがあり、例えば、濃縮槽19の濃縮
が終了した時にはコック22を閉め、コック23を開け
ることにより、濃縮槽20が終了した時にはコック24
を閉め、コック25を開けることにより、各々の濃縮槽
を独立に脱着できる。この場合も分岐の数を増すことに
より3個以上の濃縮槽が具備できる。
FIG. 3 shows another embodiment. This device has a cock at the branched part of the connecting pipe 21. For example, when the concentration in the concentration tank 19 is finished, the cock 22 is closed and the cock 23 is opened, and when the concentration tank 20 is finished, the cock 24 is closed.
By closing the cock 25 and opening the cock 25, each concentration tank can be attached and detached independently. Also in this case, three or more concentration tanks can be provided by increasing the number of branches.

(発明の効果) 以上、実施例に示したように、本発明の装置で蒸発濃縮
を行うことにより、有毒な三酸化イオウが発生すること
なく、従来法および従来装置より数倍〜30倍程変進速
さで濃縮が行えた。また、密閉形であるため外部からの
コンタミネーションが低減でき、黒鉛炉原子吸光法での
硫酸中の金属不純物元素の分析が0.019g/l程度
の極微量濃度まで行えた。複数の硫酸試料がある場合、
複数個の濃縮槽を具備する装置を用いることにより処理
時間を著しく軽減できた。
(Effects of the Invention) As shown in the examples above, by performing evaporation concentration using the apparatus of the present invention, toxic sulfur trioxide is not generated, and the concentration is several times to 30 times that of the conventional method and conventional apparatus. Concentration was possible at variable speed. In addition, since it is a closed type, contamination from the outside can be reduced, and analysis of metal impurity elements in sulfuric acid using graphite furnace atomic absorption spectrometry was possible down to an extremely trace concentration of about 0.019 g/l. If you have multiple sulfuric acid samples,
By using a device equipped with multiple concentration tanks, the processing time could be significantly reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す装置の側面図、第2図
、第3図は他の実施例の部分斜視図、第4図は従来の真
空蒸留装置の側面図である。 図において、 1.14,15,19.20・・・濃縮槽、2・・・硫
酸原液、3・・・加熱装置、4・・・保温材、5,16
,21,26・・・連結管、6.7.17,18.22
〜25・・・コック、8・・・冷却部、9・・・冷却水
入口、10・・・冷却水出口、11・・・減圧用側管、
12・・・受槽、13.・、減圧口、27・・・キャピ
ラリー、28・・・温度計を示す。 閉 ? 図 第3図
FIG. 1 is a side view of an apparatus showing one embodiment of the present invention, FIGS. 2 and 3 are partial perspective views of other embodiments, and FIG. 4 is a side view of a conventional vacuum distillation apparatus. In the figure, 1. 14, 15, 19. 20... concentration tank, 2... sulfuric acid stock solution, 3... heating device, 4... heat insulating material, 5, 16
, 21, 26... Connecting pipe, 6.7.17, 18.22
~25...Cock, 8...Cooling section, 9...Cooling water inlet, 10...Cooling water outlet, 11...Side pipe for pressure reduction,
12...Receiving tank, 13.・, Decompression port, 27... Capillary, 28... Thermometer. Closed? Figure 3

Claims (1)

【特許請求の範囲】[Claims] 硫酸原液を入れた濃縮槽と、濃縮槽を加熱する加熱装置
と、発生する蒸気を凝縮させる冷却部と、凝縮液を補集
する受槽とを有する硫酸濃縮装置において、単一もしく
は複数の濃縮槽を具備し、該濃縮槽および該濃縮槽と冷
却部の間に設けたコック付の連結管の一部を保温材でお
おう構造を有することを特徴とする硫酸濃縮装置。
In a sulfuric acid concentrator that has a concentration tank containing a sulfuric acid stock solution, a heating device that heats the concentration tank, a cooling section that condenses the generated steam, and a receiving tank that collects the condensed liquid, a single or multiple concentration tanks are used. 1. A sulfuric acid concentrator, comprising: a sulfuric acid concentrator, and a structure in which a part of the concentrating tank and a connecting pipe with a cock provided between the concentrating tank and the cooling section are covered with a heat insulating material.
JP17961185A 1985-08-14 1985-08-14 Sulfuric acid concentration apparatus Pending JPS6241703A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17961185A JPS6241703A (en) 1985-08-14 1985-08-14 Sulfuric acid concentration apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17961185A JPS6241703A (en) 1985-08-14 1985-08-14 Sulfuric acid concentration apparatus

Publications (1)

Publication Number Publication Date
JPS6241703A true JPS6241703A (en) 1987-02-23

Family

ID=16068777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17961185A Pending JPS6241703A (en) 1985-08-14 1985-08-14 Sulfuric acid concentration apparatus

Country Status (1)

Country Link
JP (1) JPS6241703A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508915B1 (en) 1996-12-20 2003-01-21 Fujitsu Limited Apparatus and method for distilling waste liquids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6508915B1 (en) 1996-12-20 2003-01-21 Fujitsu Limited Apparatus and method for distilling waste liquids
US7232504B2 (en) 1996-12-20 2007-06-19 Fujitsu Limited Apparatus and method for distilling waste liquids

Similar Documents

Publication Publication Date Title
CN108645926A (en) The remaining detection method of pesticide in a kind of Bee Pollen
JPS6241703A (en) Sulfuric acid concentration apparatus
JP5021724B2 (en) Sample collection system and method
CN105954348B (en) A kind of Analysis of High-Purity Indium detection method
US7089812B2 (en) Transfer of a sample from a solid support into a liquid
KR100211672B1 (en) A condensing apparatus and a method of chemical for semiconductor process
JPH07181157A (en) Method for monitoring water with respect to organic impurity
KR100187448B1 (en) Concentrating method and apparatus of chemical for semiconductor process
JP2004109072A (en) Analysis method for metal impurity in solution
JPS62187250A (en) Capillary gas chromatographic apparatus for analyzing volatile component
JP3065824B2 (en) Trace substance extraction method and extraction device
JPS61149201A (en) Apparatus for concentrating sample
JPH0915174A (en) Method for chemical analysis and equipment for pretreatment therefor
JP2909086B2 (en) Method and apparatus for collecting impurities on semiconductor substrate surface
JP3254631B2 (en) Trace substance extraction device
US20220050085A1 (en) System and Method of Matrix Accelerated Vacuum-Assisted Sorbent Extraction for Improved Sample Preparation Prior to GCMS Analysis
CN109187155A (en) The effective test method of the method for extraction and purification of boron and a kind of boron istope composition in a kind of water sample
CN214150546U (en) High humidity gas sample rapid dehydration mass spectrum sampling device
JP2793208B2 (en) Distillation purification method
JP3144065B2 (en) Determination of boron in sulfuric acid
JPH04204035A (en) Sample pretreatment device
JPH01189558A (en) Analyzing method of surface of si semiconductor substrate
JPH0120979Y2 (en)
Green Bauerle GI and Sandall OC (1987) Batch distillation of binary mixtures at minimum reflux. AIChE Journal 33: 1034. Block B (1961) Batch distillation of binary mixtures pro-vides versatile process operations. Chemical Engineering
Kunin et al. Ion Exchange Chromatography