JPS6240830U - - Google Patents
Info
- Publication number
- JPS6240830U JPS6240830U JP13004085U JP13004085U JPS6240830U JP S6240830 U JPS6240830 U JP S6240830U JP 13004085 U JP13004085 U JP 13004085U JP 13004085 U JP13004085 U JP 13004085U JP S6240830 U JPS6240830 U JP S6240830U
- Authority
- JP
- Japan
- Prior art keywords
- sink
- processing apparatus
- wet processing
- drain pipe
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13004085U JPS6240830U (da) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13004085U JPS6240830U (da) | 1985-08-28 | 1985-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240830U true JPS6240830U (da) | 1987-03-11 |
Family
ID=31027161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13004085U Pending JPS6240830U (da) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240830U (da) |
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1985
- 1985-08-28 JP JP13004085U patent/JPS6240830U/ja active Pending