JPS6239967U - - Google Patents
Info
- Publication number
- JPS6239967U JPS6239967U JP1985132696U JP13269685U JPS6239967U JP S6239967 U JPS6239967 U JP S6239967U JP 1985132696 U JP1985132696 U JP 1985132696U JP 13269685 U JP13269685 U JP 13269685U JP S6239967 U JPS6239967 U JP S6239967U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- fixed table
- semiconductor wafer
- wafer
- wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000007517 polishing process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985132696U JPS6239967U (sl) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985132696U JPS6239967U (sl) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6239967U true JPS6239967U (sl) | 1987-03-10 |
Family
ID=31032326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985132696U Pending JPS6239967U (sl) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6239967U (sl) |
-
1985
- 1985-08-29 JP JP1985132696U patent/JPS6239967U/ja active Pending
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