JPS6239298Y2 - - Google Patents
Info
- Publication number
- JPS6239298Y2 JPS6239298Y2 JP17242882U JP17242882U JPS6239298Y2 JP S6239298 Y2 JPS6239298 Y2 JP S6239298Y2 JP 17242882 U JP17242882 U JP 17242882U JP 17242882 U JP17242882 U JP 17242882U JP S6239298 Y2 JPS6239298 Y2 JP S6239298Y2
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- vane
- movable electrode
- electrode plate
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 17
- 239000012530 fluid Substances 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 2
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17242882U JPS5977024U (ja) | 1982-11-15 | 1982-11-15 | ベ−ン式流量検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17242882U JPS5977024U (ja) | 1982-11-15 | 1982-11-15 | ベ−ン式流量検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5977024U JPS5977024U (ja) | 1984-05-24 |
JPS6239298Y2 true JPS6239298Y2 (ru) | 1987-10-07 |
Family
ID=30375863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17242882U Granted JPS5977024U (ja) | 1982-11-15 | 1982-11-15 | ベ−ン式流量検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5977024U (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017009380A (ja) * | 2015-06-19 | 2017-01-12 | 東京エレクトロン株式会社 | 流量測定装置、及び処理装置 |
-
1982
- 1982-11-15 JP JP17242882U patent/JPS5977024U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017009380A (ja) * | 2015-06-19 | 2017-01-12 | 東京エレクトロン株式会社 | 流量測定装置、及び処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5977024U (ja) | 1984-05-24 |
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