JPS6239298Y2 - - Google Patents

Info

Publication number
JPS6239298Y2
JPS6239298Y2 JP17242882U JP17242882U JPS6239298Y2 JP S6239298 Y2 JPS6239298 Y2 JP S6239298Y2 JP 17242882 U JP17242882 U JP 17242882U JP 17242882 U JP17242882 U JP 17242882U JP S6239298 Y2 JPS6239298 Y2 JP S6239298Y2
Authority
JP
Japan
Prior art keywords
flow rate
vane
movable electrode
electrode plate
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17242882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5977024U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17242882U priority Critical patent/JPS5977024U/ja
Publication of JPS5977024U publication Critical patent/JPS5977024U/ja
Application granted granted Critical
Publication of JPS6239298Y2 publication Critical patent/JPS6239298Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP17242882U 1982-11-15 1982-11-15 ベ−ン式流量検出装置 Granted JPS5977024U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17242882U JPS5977024U (ja) 1982-11-15 1982-11-15 ベ−ン式流量検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17242882U JPS5977024U (ja) 1982-11-15 1982-11-15 ベ−ン式流量検出装置

Publications (2)

Publication Number Publication Date
JPS5977024U JPS5977024U (ja) 1984-05-24
JPS6239298Y2 true JPS6239298Y2 (2) 1987-10-07

Family

ID=30375863

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17242882U Granted JPS5977024U (ja) 1982-11-15 1982-11-15 ベ−ン式流量検出装置

Country Status (1)

Country Link
JP (1) JPS5977024U (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017009380A (ja) * 2015-06-19 2017-01-12 東京エレクトロン株式会社 流量測定装置、及び処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017009380A (ja) * 2015-06-19 2017-01-12 東京エレクトロン株式会社 流量測定装置、及び処理装置

Also Published As

Publication number Publication date
JPS5977024U (ja) 1984-05-24

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